Stacked Gate IC Layout for Dummy-Free Control Signal Routing

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Solution Overview

Problem

In semiconductor fabrication, achieving better gate density in integrated circuits is challenging due to the need for dummy gate structures in routing, which occupies extra area and complicates the design.

Innovation Solution

The implementation of a complementary field-effect transistor (CFET) with a buried power rail and PMOS/NMOS transistors of different depths, along with an insulating layer between gates, allows for reduced cell height and efficient routing without the need for dummy gates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If dummy gate structures are added for routing, then routing functionality is achieved, but occupied area increases

Engineering Contradiction:
Improverouting functionalityVSAvoidoccupied area
Core Design Contradiction:
Ease of operationVSArea of stationary object

Solution Approach 1:

The patent merges the gate structure with the routing function by making the gate itself conductive and capable of carrying control signals. The gate electrode is extended to form routing paths, eliminating the need for separate dummy gate structures. This integration allows the gate to serve dual purposes: controlling the transistor and providing routing connectivity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The gate structure is designed to perform multiple functions simultaneously. It acts as both the control electrode for the transistor channel and as a routing conductor for control signals. The gate electrode material and structure are configured to provide both electrical control function and interconnect function, reducing the need for additional dedicated routing elements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Productivity

If complementary field-effect transistor with different depth PMOS/NMOS is used, then gate density is improved, but device complexity increases

Engineering Contradiction:
Improvegate densityVSAvoiddevice complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent transitions from planar transistor arrangement to vertical stacking by placing PMOS and NMOS transistors at different depths (different z-coordinates). This three-dimensional configuration allows overlapping of transistor footprints in the planar view, effectively doubling the gate density within the same footprint area while maintaining electrical isolation through vertical separation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested structure where the PMOS transistor is positioned above the NMOS transistor in the vertical dimension. The gate electrodes, source/drain regions, and channel structures are arranged in nested layers, with upper-layer structures positioned over lower-layer structures. This nesting approach maximizes space utilization and achieves high density while maintaining functional independence of each transistor.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Reliability

If insulating layer is placed between gates, then electrical isolation is achieved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveelectrical isolationVSAvoidmanufacturing precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent introduces an insulating layer as an intermediary between the PMOS and NMOS gate electrodes. This insulating layer acts as a mediator that provides electrical isolation while allowing the two gates to be in close proximity or even overlapping in the planar view. The insulating material fills the space between gates and prevents unwanted electrical interaction, enabling high-density vertical stacking.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The insulating layer is strategically placed only in specific locations where electrical isolation is needed between gates, rather than uniformly throughout the entire structure. This localized application of insulation maintains electrical isolation where required while minimizing the impact on manufacturing complexity and allowing other regions to maintain simpler structures for easier fabrication.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS12237332B2Integrated circuit
Publication Date: 2025.02.25 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12237332B2 patent drawing
  • US12237332B2 patent drawing
  • US12237332B2 patent drawing

AI summary

An integrated circuit is provided and includes first and second gates arranged in first and second layers, wherein the first and second gates extend in a first direction; a first insulating layer interposed between the first and second gates, wherein the first insulating layer, a first portion of the first gate, and a first portion of the second gate overlap with each other in a layout view; a cut layer, different from the first insulating layer, disposed on a second portion of the first gate; a first via passing through the cut layer and coupled to the second portion of the first gate; and a second via overlapping the first portion of the first gate and the first portion of the second gate, and coupled to the second gate. The first and second vias are configured to transmit different control signals to the first and second gates.