Stacked Magnetic Sensor for Compact Directional Detection
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Solution Overview
Problem
Existing magnetic field detection units face challenges in miniaturization and improving detection accuracy, particularly in detecting magnetic fields perpendicular to the substrate plane using magnetoresistive effect elements.
Innovation Solution
A magnetic sensor with a stacked structure comprising a magnetic yoke and discrete magnetic field generators, where the generators apply a bias magnetic field to a magnetic field detection element, and are inclined at less than 45 degrees relative to the axis direction, with an exchange-coupled bias structure using a ferromagnetic and antiferromagnetic body, allowing for precise magnetic field detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If magnetic field generators are disposed discretely along the first-axis direction with magnetization directions inclined at less than 45 degrees, then magnetic field detection accuracy in a predetermined direction is improved, but device complexity increases due to the stacked structure with multiple tiers
Solution Approach 1:
The patent transitions from a planar arrangement to a three-dimensional stacked structure, placing magnetic field generators in the second tier above the first tier containing the magnetic yoke and detection element. This vertical arrangement in another dimension enables precise magnetic field application at angles less than 45 degrees while maintaining compact footprint, resolving the contradiction between detection accuracy and device complexity.
Solution Approach 2:
The device is divided into distinct functional tiers: the first tier contains the magnetic yoke and magnetic field detection element, while the second tier contains multiple magnetic field generators disposed discretely. This segmentation allows independent optimization of each component's position and orientation, enabling precise magnetic field application without requiring complex integration, thus improving detection accuracy while managing structural complexity.
2Measurement precision
If magnetic field generators are disposed discretely along the first-axis direction, then magnetic field detection accuracy is improved, but the area occupied by the device increases
Solution Approach 1:
By arranging magnetic field generators in the second tier above the first tier, the patent utilizes the vertical dimension to accommodate discrete generators without increasing the planar footprint. This three-dimensional arrangement allows precise magnetic field application while maintaining a compact area, effectively resolving the contradiction between detection accuracy and device area.
3Measurement precision
If a stacked structure with magnetic yoke and discrete generators is used, then magnetic field detection accuracy is improved, but manufacturing complexity increases
Solution Approach 1:
The device is segmented into two distinct tiers that can be manufactured separately and then assembled. The first tier includes the magnetic yoke and detection element, while the second tier includes the magnetic field generators. This segmentation simplifies manufacturing by allowing independent fabrication and optimization of each tier, reducing overall manufacturing complexity while maintaining detection accuracy.
Solution Approach 2:
The stacked structure utilizes vertical stacking to separate functional elements, enabling standard semiconductor manufacturing techniques to be applied to each tier independently. This dimensional separation simplifies the manufacturing process by avoiding complex in-plane routing and integration, making the device more manufacturable despite the added vertical dimension.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables accurate magnetic field detection in a predetermined direction while achieving miniaturization, enhancing the performance of magnetic field detection units, position detection units, lens modules, and imaging apparatuses.
Implementation Method 1
magnetic field generators that are disposed discretely along a first-axis direction and each apply a magnetic field to the magnetic field detection element
Implementation Method 2
A magnetic sensor including a magnetoresistive effect element has been used in various applications
Implementation Method 3
an exchange-coupled bias structure using a ferromagnetic and antiferromagnetic body
Data Source
AI summary
A magnetic sensor includes a stacked structure including a first tier and a second tier. The first tier includes a magnetic yoke. The second tier includes a magnetic field detection element, and magnetic field generators that are disposed discretely along a first-axis direction and each apply a magnetic field to the magnetic field detection element. The first tier and the second tier are stacked in order in a second-axis direction intersecting the first-axis direction. The magnetic field detection element is interposed between two magnetic field generators in the first-axis direction. The magnetic yoke extends in the first-axis direction, and is adjacent to the magnetic field detection element in a third-axis direction in a plan view, the third-axis direction intersecting both the first-axis direction and the second-axis direction. Respective magnetization directions of the magnetic field generators are each inclined at less than 45 degrees with respect to the first-axis direction.