Stacked Memory Cell Structure for High-Density Semiconductor Storage
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Solution Overview
Problem
Current semiconductor devices face challenges in achieving high storage capacity per unit area and efficient memory cell stacking with existing technologies, limiting their productivity and integration density.
Innovation Solution
A semiconductor device structure featuring a memory cell configuration with specific layers and conductors, insulators, and oxides, including In, Al, Ga, Y, Sn, and Zn-based oxides, allows for the stacking of memory cells with low resistance regions and high productivity, enabling increased storage capacity and efficient data handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If memory cells are stacked to increase storage capacity per unit area, then storage capacity increases, but device complexity increases
Solution Approach 1:
The patent implements vertical stacking of memory cells in the z-direction, transitioning from planar to three-dimensional architecture. Multiple memory cell layers are stacked above a common substrate, with bit lines extending vertically through insulating layers to connect to different memory cell levels. This dimensional change enables increased storage capacity per unit area while maintaining manageable device complexity through systematic layering and shared common lines.
2Quantity of substance
If more memory cells are stacked, then storage capacity per unit area increases, but manufacturing precision requirements increase
Solution Approach 1:
The memory device is divided into discrete memory cell layers, each with standardized structures including bit lines, insulating layers, and conductive elements. Each layer can be manufactured and assembled relatively independently, with precise alignment features built into the layer structures. This segmentation allows complex three-dimensional stacking to be achieved through repeated, standardized manufacturing steps rather than requiring entirely new high-precision processes for each additional layer.
3Quantity of substance
If complex charge injection processes are used to achieve high storage capacity, then storage capacity increases, but device complexity and manufacturing difficulty increase
Solution Approach 1:
The memory cell structure utilizes inherent electrical properties of the stacked configuration and conductive materials to maintain stored data. The design leverages natural charge retention characteristics of the insulator-conductor-insulator stacks and oxide layers, eliminating the need for active charge injection or complex programming mechanisms. Data is retained through the physical state of the stacked structure itself, simplifying both device operation and manufacturing processes.
Data Source
AI summary
A semiconductor device with a large storage capacity per unit area is provided.A semiconductor device includes a memory cell. The memory cell includes a first conductor; a first insulator over the first conductor; a first oxide over the first insulator and including a first region, a second region, and a third region positioned between the first region and the second region; a second insulator over the first oxide; a second conductor over the second insulator; a third insulator positioned in contact with a side surface of the first region; and a second oxide positioned on the side surface of the first region, with the third insulator therebetween. The first region includes a region overlapping the first conductor. The third region includes a region overlapped by the second conductor. The first region and the second region have a lower resistance than the third region.


