Stacked Pixel Architecture for 100% Fill Factor Image Sensors

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Solution Overview

Problem

Conventional image sensors have a limited fill factor due to the allocation of both photodiodes and transistors within the same active region, leading to reduced light capture efficiency and increased noise, with existing solutions like microlenses increasing production costs and causing cross-talk effects.

Innovation Solution

The implementation of a pixel architecture with two patterned semiconductor layers, where the top layer is dedicated to photodiodes with a 100% fill factor and the bottom layer contains transistors for signal detection, amplification, and transmission, separated by an interlayer insulating layer with metal interconnections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If photodiodes and transistors are allocated within the same active region, then the device complexity is reduced, but the fill factor is limited and light capture efficiency is reduced

Engineering Contradiction:
Improvepixel structureVSAvoidfill factor
Core Design Contradiction:
Device complexityVSArea of moving object

Solution Approach 1:

The pixel structure is segmented into two separate semiconductor layers: a first semiconductor layer containing photodiodes for light detection, and a second semiconductor layer containing transistors for signal processing. This segmentation allows each layer to be optimized independently, achieving 100% fill factor in the first layer while maintaining necessary transistor functionality in the second layer.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from a planar two-dimensional layout to a three-dimensional stacked architecture. By vertically stacking the first semiconductor layer with photodiodes and the second semiconductor layer with transistors, separated by an interlayer insulating layer, the design maximizes the light-sensitive area in the horizontal plane while accommodating signal processing components in the vertical dimension.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Extent of automation

If transistors are included in the active region, then signal processing is integrated, but noise increases and light capture efficiency decreases

Engineering Contradiction:
Improvesignal processing integrationVSAvoidnoise
Core Design Contradiction:
Extent of automationVSObject-affected harmful factors

Solution Approach 1:

The pixel is divided into distinct functional zones across two layers: the first semiconductor layer is dedicated exclusively to photodiodes for light capture, while the second semiconductor layer houses transistors for signal processing. This spatial segmentation isolates noise-generating transistor operations from the sensitive photodiode region, reducing electromagnetic interference and noise while maintaining integrated signal processing capability.

Inventive Principle:
Principle #1Segmentation

3Area of moving object

If microlenses are added to increase fill factor, then light capture efficiency improves, but production costs increase and cross-talk effects occur

Engineering Contradiction:
Improvefill factorVSAvoidproduction cost
Core Design Contradiction:
Area of moving objectVSEase of manufacture

Solution Approach 1:

Instead of adding microlenses as a post-processing solution, the invention preliminarily designs the pixel structure with 100% fill factor by separating photodiodes and transistors into different semiconductor layers. This preliminary structural optimization eliminates the need for additional microlens components and their associated alignment and fabrication processes, reducing production complexity and cost while avoiding cross-talk issues.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances light capture efficiency, reduces noise, and eliminates cross-talk, allowing for improved image quality and dynamic range without increasing production costs, as the fill factor is maximized and the transistors do not affect the photodiode area.

Implementation Method 1

Each pixel includes a photodiode for generating signal charges in response to photons (i.e., light) incident thereon

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS11862660B2Pixel having two semiconductor layers, image sensor including the pixel, and image processing system including the image sensor
Publication Date: 2024.01.02 SAMSUNG ELECTRONICS CO LTD
  • US11862660B2 patent drawing
  • US11862660B2 patent drawing
  • US11862660B2 patent drawing

AI summary

An image sensor having pixels that include two patterned semiconductor layers. The top patterned semiconductor layer contains the photoelectric elements of pixels having substantially 100% fill-factor. The bottom patterned semiconductor layer contains transistors for detecting, resetting, amplifying and transmitting signals charges received from the photoelectric elements. The top and bottom patterned semiconductor layers may be separated from each other by an interlayer insulating layer that may include metal interconnections for conducting signals between devices formed in the patterned semiconductor layers and from external devices.