Chamber Stage Cleaning via Shock Wave and Cyclone Airflow
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Solution Overview
Problem
Existing cleaning methods for removing contaminants from a stage in a chamber are limited in effectiveness, as shock wave generation conditions may not be set appropriately, leading to incomplete removal of particles, which can re-adhere to the stage or remain in the chamber.
Innovation Solution
A cleaning method involving the application of a high-pressure gas to generate a shock wave on the stage, followed by scavenging with a cyclone airflow to immediately exhaust particles outside the chamber, optimizing the distance between the shower head and stage for effective shock wave application and particle removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a shock wave is generated to remove contaminants from the stage, then particle removal effectiveness is improved, but particles may re-adhere to the stage or remain in the chamber
Solution Approach 1:
The patent applies continuous cyclone airflow after shock wave generation to maintain particle removal action. The airflow continuously sweeps particles away from the stage surface, preventing re-adhesion and ensuring complete removal throughout the cleaning process.
Solution Approach 2:
The patent introduces cyclone airflow as an intermediary mechanism between the shock wave and particle removal. The airflow acts as a mediator that captures particles dislodged by the shock wave and transports them away, preventing re-deposition on the stage.
2Manufacturing precision
If the distance between shower head and stage is optimized for shock wave application, then cleaning effectiveness is improved, but device complexity increases
Solution Approach 1:
The patent optimizes the distance parameter between the shower head and stage to achieve effective shock wave application. By carefully selecting and adjusting this dimensional parameter, the system achieves optimal cleaning effectiveness without requiring complex mechanical adjustments.
3Quantity of substance
If subsonic gas is flowed through the chamber to collect particles, then particle collection is achieved, but contamination removal from the stage is incomplete
Solution Approach 1:
The patent employs shock wave generation as a form of mechanical disturbance to dislodge contaminants from the stage surface. The shock wave creates intense pressure fluctuations that effectively remove adhered particles, which subsonic gas flow alone cannot achieve.
Solution Approach 2:
The patent uses high-speed gas flow to generate shock waves for particle removal, then employs cyclone airflow (a pneumatic mechanism) to collect and remove the dislodged particles. This two-stage pneumatic approach overcomes the limitations of simple subsonic gas flow.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively separates and removes contaminants from the stage, ensuring they are not re-deposited, by optimizing shock wave generation and cyclone airflow for complete particle removal.
Implementation Method 1
supplying a first gas that forms a shock wave toward the stage
Implementation Method 2
scavenging with a cyclone airflow to immediately exhaust particles outside the chamber
Data Source
AI summary
A cleaning method that removes contaminants adhering to a stage in a chamber, includes: setting a pressure in a chamber to a predetermined vacuum pressure; supplying a first gas that forms a shock wave toward the stage; and supplying a second gas that does not form the shock wave toward the stage.