Multi-Plate Stage With Insulating Grooves For Thermal Gradient Control
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Solution Overview
Problem
Conventional ceramic stages face damage due to excessive temperature differences between inner and outer regions, limiting the achievable temperature gradient to about 10°C, which is insufficient for modern semiconductor manufacturing needs.
Innovation Solution
A stage design incorporating multiple metal plates with varying groove and through-hole configurations, along with a circulating flow path and heater arrangement, to create a large temperature difference between inner and outer regions, utilizing a heat insulating portion to manage thermal stress and maintain uniform temperature distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the temperature difference between inner region and outer region exceeds 10°C in a ceramic stage, then a larger temperature gradient profile is achieved, but the stage may be damaged
Solution Approach 1:
The stage is divided into multiple metal plates (first metal plate, second metal plate, third metal plate) stacked in the thickness direction, with heat insulating portions provided between them. This segmentation allows independent temperature control of inner and outer regions while preventing thermal stress damage through the insulating barriers between plate layers.
Solution Approach 2:
The stage combines metal plates (for thermal conductivity and structural strength) with heat insulating portions (for thermal isolation). This composite structure enables large temperature gradients (exceeding 10°C) between inner and outer regions while preventing stage damage through the insulating material that reduces thermal stress.
2Temperature
If a heat insulating portion is provided between inner and outer regions, then a temperature gradient profile with large temperature difference is achieved, but the device structure becomes more complex
Solution Approach 1:
The heat insulating portion is formed by nested grooves and through-holes in stacked metal plates. The first groove in the first metal plate, through hole in the second metal plate, and second groove in the third metal plate are aligned to create the insulating space, utilizing the nesting principle to achieve complex thermal management through layered simple structures.
Solution Approach 2:
The heat insulating portion extends in the thickness direction (vertical dimension) of the stage, creating thermal isolation between inner and outer regions by adding a vertical dimension to the heat insulation path. This allows temperature gradient control without complicating the horizontal plane structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The stage achieves a temperature gradient exceeding 20°C, effectively correcting significant temperature drops in the outer region to ensure uniform wafer temperature distribution, enhancing semiconductor processing capabilities while minimizing deformation from thermal stress.
Implementation Method 1
a temperature gradient profile in which the temperature of the inner peripheral region and the temperature of the outer peripheral region are different by controlling a heater element in the inner peripheral region and a heater element in the outer peripheral region, respectively
Implementation Method 2
the temperature increases from the inner peripheral region toward the outer peripheral region
Implementation Method 3
a heat insulating portion including a first space provided in the first metal plate and a second space provided in the second metal plate
Data Source
Figure 1
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AI summary
A stage includes a first metal plate, a second metal plate below the first metal plate, a heat insulating portion including a first space provided in the first metal plate and a second space provided in the second metal plate, and a circulating flow path and a heater with the insulating portion therebetween. In a cross-sectional view, a width of the heat insulating portion in the first metal plate is different from a width of the heat insulating portion in the second metal plate.