Stepped Waveguide for Atmospheric Plasma Concentration

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Solution Overview

Problem

Existing plasma generating apparatuses with tapered waveguides fail to effectively concentrate the electric field at the plasma generation chamber, leading to reduced plasma generation efficiency compared to the waveguide's rear end.

Innovation Solution

A waveguide with multiple steps, including a final short portion and alternating tall and tapered sections, is designed to maximize electric field concentration and plasma stability by utilizing resonance effects and preventing energy reflection, allowing for efficient plasma generation at the short portion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a tapered waveguide structure is used to concentrate electromagnetic waves, then the electric field concentration at the plasma generation chamber is improved, but the actual concentration effect reduces compared to the rear end of the waveguide

Engineering Contradiction:

Improveelectric field concentrationVSAvoidplasma generation stability

Core Design Contradiction:

Illumination intensityVSReliability

Solution Approach 1:

The waveguide is divided into multiple sections with different height characteristics: a first tapered section for initial electromagnetic wave concentration, a second tapered section for further concentration, and a short section for stable plasma generation. This segmentation allows each section to perform its specific function optimally, resolving the contradiction between concentration effect and plasma stability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different sections of the waveguide are designed with different local geometric properties (tapered vs. short sections) to create optimal conditions for different stages of the process: electromagnetic wave concentration in tapered sections and stable plasma generation in the short section. This local differentiation resolves the contradiction by providing appropriate conditions for each function.

Inventive Principle:

Principle #3Local quality

2Illumination intensity

If the waveguide height is continuously decreased to concentrate electric field, then electromagnetic wave concentration is improved, but plasma stability deteriorates

Engineering Contradiction:

Improveelectric field concentrationVSAvoidplasma stability

Core Design Contradiction:

Illumination intensityVSStability of the object's composition

Solution Approach 1:

The continuous height decrease is segmented into discrete sections: first tapered portion, second tapered portion, and short portion. This segmentation prevents the instability caused by continuous tapering while maintaining the electric field concentration benefit, thus resolving the contradiction between concentration and stability.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Instead of continuously decreasing the waveguide height, the design inverts the approach by introducing a short section at the end where the height is reduced. This inversion creates a region of high electric field concentration while maintaining plasma stability, resolving the contradiction.

Inventive Principle:

Principle #13The other way round (Inversion)

3Ease of manufacture

If a simple tapered structure is used, then manufacturing is simplified, but electric field concentration effect is insufficient

Engineering Contradiction:

Improvewaveguide fabricationVSAvoidelectric field concentration

Core Design Contradiction:

Ease of manufactureVSIllumination intensity

Solution Approach 1:

The waveguide is segmented into standardizable sections (first tapered, second tapered, short portion) that can be manufactured using conventional techniques. Each section serves a specific function, achieving good electric field concentration while maintaining ease of manufacture through modular design.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The waveguide design changes geometric parameters (height, taper angles) in discrete sections rather than continuous variation. This allows for easier manufacturing while still achieving the desired electric field concentration effect through optimized parameter selection in each section.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The new waveguide structure achieves enhanced electric field concentration and stable plasma generation, outperforming traditional designs by maintaining a stronger electric field and improving plasma stability even with changes in process gas flow rates.

Implementation Method 1

the waveguide includes at least one or more steps, and plasma is generated at a waveguide region including a final short portion

Methodology Applied

Scientific EffectElectromagnetic wave concentration: Focusing

Implementation Method 2

plasma is generated at a waveguide region including a final short portion

Methodology Applied

Scientific EffectPlasma generation: Ionisation

Data Source

PatentUS8653911B2Atmospheric plasma equipment and waveguide for the same

Publication Date: 2014.02.18 TRIPLE CORES TECH CO LTD

AI summary

Provided is an atmospheric plasma equipment and a waveguide for the same. The atmospheric plasma equipment according to this disclosure includes: an oscillator supplying an electromagnetic wave; and a waveguide into which the electromagnetic wave generated from the oscillator is input to be propagated therethrough, wherein the waveguide includes at least one or more steps, and plasma is generated at a waveguide region including a final short portion. The atmospheric plasma equipment may simultaneously attain an effect of causing concentration of an electromagnetic wave applied through the waveguide with one or more steps and an effect of stably maintaining generated plasma.