Storage Cassette for Plasma Processing Focus Ring Replacement
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Solution Overview
Problem
Current semiconductor workpiece processing systems require manual replacement of parts like focus rings in plasma processing chambers, leading to expensive downtime, contamination risks, and reduced workpiece throughput due to the need to vent and open the chambers for maintenance.
Innovation Solution
An automated system using a portable storage cassette and robotic arm to replace focus rings within the vacuum environment, allowing for in-situ plasma cleaning and precise handling of parts without breaking the vacuum, utilizing a lift mechanism and end effector to move parts between storage and processing stations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual replacement of parts is performed, then ease of operation is improved, but productivity deteriorates due to chamber venting and opening requirements
Solution Approach 1:
The system separates the replacement part storage and handling functions from the processing chamber by introducing a dedicated storage chamber. The robotic arm operates independently in the storage chamber to retrieve parts, which are then transferred to the processing chamber. This segmentation allows automated part replacement without requiring chamber venting or opening, thus maintaining productivity while improving ease of operation through automation.
Solution Approach 2:
A robotic arm serves as an intermediary between the storage chamber and processing chamber, enabling automated transfer of replacement parts. This intermediary mechanism eliminates the need for manual intervention and chamber opening, resolving the contradiction by providing easy automated operation while maintaining continuous chamber vacuum and high productivity.
2Ease of operation
If manual replacement of parts is performed, then ease of operation is improved, but loss of time increases due to chamber venting and opening
Solution Approach 1:
Replacement parts are pre-stored in the storage chamber under vacuum conditions. When part replacement is needed, the robotic arm can immediately retrieve and transfer the pre-positioned part to the processing chamber without requiring chamber venting or opening. This preliminary preparation eliminates downtime while the automated robotic system provides ease of operation.
Solution Approach 2:
The robotic arm as an intermediary enables rapid automated part transfer between chambers without breaking vacuum. This eliminates the time-consuming manual processes of chamber opening and closing while maintaining ease of operation through automated control, directly resolving the time loss issue.
3Ease of operation
If manual replacement of parts is performed, then ease of operation is improved, but reliability deteriorates due to contamination risks
Solution Approach 1:
The system divides the vacuum environment into separate chambers: a storage chamber for holding replacement parts and a processing chamber for workpiece treatment. This segmentation prevents contamination by keeping replacement parts isolated in their own vacuum environment until needed, while the automated robotic transfer maintains vacuum integrity, thus improving reliability without sacrificing operational ease.
Solution Approach 2:
The robotic arm acts as a contamination-free intermediary that transfers parts between chambers under vacuum conditions. This eliminates manual handling that could introduce contaminants, improving reliability through automated cleanroom-grade operation while maintaining ease of operation through programmable robotic control.
4Productivity
If automated replacement system is implemented, then productivity is improved, but device complexity increases
Solution Approach 1:
The automated system is segmented into distinct functional modules: a storage chamber for parts, a processing chamber for workpieces, and a robotic arm for transfer. This modular segmentation manages device complexity by organizing functions separately, while the coordinated operation of these modules achieves high productivity through automated continuous operation without manual intervention.
5Loss of time
If automated replacement system is implemented, then loss of time is reduced, but device complexity increases
Solution Approach 1:
Replacement parts are pre-stored in the vacuum environment of the storage chamber before needed. The robotic arm is pre-programmed with retrieval and transfer sequences. This preliminary preparation eliminates downtime by ensuring parts are ready for immediate automated transfer, reducing loss of time while managing complexity through pre-planned automated sequences rather than complex real-time decision systems.
Data Source
AI summary
A cassette for a workpiece processing system is provided. The cassette is configured to hold one or more replaceable parts, one or more workpieces and one or more pedestal protectors. The cassette includes a divider configured to separate the one or more replacement parts from the one or more workpieces and/or one or more pedestal protectors. The cassette is configured to be disposed in a storage chamber of a workpiece processing apparatus to facilitate automated replacement of replacement parts in one or more processing chambers. Workpiece processing systems and methods of replacing replacement parts in a workpiece processing system are also provided.