Structured Glass Channels With Laser-Controlled Taper Angles
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Solution Overview
Problem
Existing methods for structuring glass elements using ultrashort pulse lasers require extensive process control and are primarily focused on separation rather than structuring, which can be complex and precise.
Innovation Solution
A method involving the use of a pulsed laser beam from an ultrashort pulse laser to create filament-shaped flaws in a glass element, which are then widened by an etching medium to form walls or channels with tapered boundaries, allowing for precise structuring without the need for precise process control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If oblique laser pulses are directed onto the glass element surface to create tilted filaments, then the filament-shaped flaws extend obliquely to the surfaces, but extensive process control is required to adjust and monitor laser parameters and workpiece positioning very precisely
Solution Approach 1:
Instead of directing the laser beam obliquely onto the surface to achieve tilted filaments, the invention inverts the approach by directing the laser beam perpendicularly onto the surface and using a tilted focus line within the perpendicular beam to create the desired oblique filament orientation. This eliminates the need for complex workpiece positioning and laser parameter adjustment while achieving the same structural outcome.
2Device complexity
If perpendicular laser beam is used with tilted focus line, then process control is simplified, but the ability to create precise oblique structures is reduced
Solution Approach 1:
The invention changes the parameters of the focus line (tilt angle, position, length) independently of the laser beam direction. By adjusting these focus line parameters, precise control over the filament-shaped flaw geometry (orientation, depth, shape) is achieved while maintaining simple perpendicular laser incidence and minimal process control requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables the creation of structured glass elements with blind holes or channels that have tapered boundaries, allowing for precise control over the geometry of the flaws and the taper angles, which is advantageous for applications such as interposers in printed circuit technology.
Implementation Method 1
several spaced apart filaments are produced along an intended separation line, exploiting a nonlinear effect of self-focusing
Implementation Method 2
at least one filament-shaped flaw is produced in the glass element, the filament-shaped flaw extending transversely to the side faces of the glass element
Implementation Method 3
The filament-shaped flaw is produced with a laser beam that is concentrated by means of a focusing optics to form a focus line in the glass element
Implementation Method 4
The glass element is exposed to an etching medium or an etching bath which removes glass by etching, so that the filament-shaped flaw widens to form a wall extending between the opposite side faces of the glass element
Data Source
AI summary
A method of structuring a glass element having a first side face and a second side face is provided. The method includes the steps of: producing a filament-shaped flaw in the glass element with a pulsed laser beam along a focus line; etching to remove glass in the filament-shaped flaw to form a wall extending from the first side face towards the second side face, the wall having a boundary line that is tapered at a vertex between the wall and the first side face with a taper angle with respect to a perpendicular of the first side face; and adjusting the taper angle by controlling a feature of the focus line. The feature is selected from a group consisting of a position of the focus line, a length of the focus line, an intensity distribution of the focus line, and any combinations thereof.