Substrate Conveyance Airflow Segmentation for Dust-Controlled Processing
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Solution Overview
Problem
In substrate processing apparatuses, dust generated from the conveyance mechanism can form defect sources due to airflow differences between cleaning lines, leading to unsatisfactory defect discharge and reduced throughput.
Innovation Solution
The apparatus features a first and second processing unit with air guide ducts connected to a fan filter unit, ensuring orderly airflow through the conveyance space by forming openings facing the processing tanks and separating the conveyance space into upper and lower segments, preventing airflow blockages and dust scattering.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple cleaning lines are arranged in parallel to achieve high throughput, then productivity is improved, but airflow differences between cleaning lines cause inconsistent defect discharge and reduce reliability
Solution Approach 1:
The conveyance space is segmented into multiple independent airflow zones using partition walls. Each cleaning line has its own dedicated airflow path from the FFU through the air guide duct to the exhaust, preventing airflow interference between parallel cleaning lines while maintaining consistent defect discharge across all lines
Solution Approach 2:
An air guide duct is introduced as an intermediary component between the FFU and the cleaning tanks. This duct systematically distributes airflow to each cleaning line and guides exhaust airflow, ensuring uniform defect discharge across multiple parallel cleaning lines without compromising throughput
2Ease of operation
If a conveyance robot moves upward and downward between cleaning lines, then ease of operation is improved, but airflow differences are caused leading to process inconsistency
Solution Approach 1:
Partition walls divide the conveyance space into separate airflow zones for each cleaning line. The conveyance robot operates within these segmented zones, maintaining accessibility while preventing airflow disruption to other lines, thereby ensuring consistent manufacturing precision across all cleaning lines
3Ease of operation
If the conveyance mechanism operates in the conveyance space, then ease of operation is improved, but dust generated from the mechanism forms defect sources
Solution Approach 1:
A controlled airflow system using pneumatic principles is implemented through the air guide duct. This airflow systematically moves through the conveyance space, capturing dust particles generated by the conveyance mechanism and directing them toward exhaust points, thereby preventing dust from forming defect sources on substrates while maintaining ease of operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances throughput by preventing dust from forming defects and ensures consistent airflow, reducing wafer defects in both processing units.
Implementation Method 1
a fan filter unit (FFU) above each conveyance chamber, which enables airstream design in which downflow from the FFU is exhausted from each of cleaning tanks
Implementation Method 2
the conveyance space of the first processing unit and the conveyance space of the second processing unit are separated into upper and lower segments by the partition wall
Data Source
AI summary
A substrate processing apparatus includes a first processing unit and a second processing unit placed in upper and lower two stages. Each processing unit has: a plurality of processing tanks arranged in series; a partition wall defining a conveyance space extending along an arrangement direction outside the plurality of processing tanks; a conveyance mechanism placed in the conveyance space and being configured to convey a substrate between the processing tanks along the arrangement direction; and an air guide duct provided to extend along the arrangement direction in the conveyance space. The air guide duct is connected with a fan filter unit. Each of the processing tanks is connected with an exhaust duct. An opening is formed in each of parts facing the processing tank in the air guide duct. The conveyance spaces of the first and second processing units are separated into upper and lower segments by the partition wall.