Substrate Alignment via Mechanical Contact in Vacuum
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Solution Overview
Problem
Existing substrate alignment technologies face challenges in achieving precise and efficient alignment and contacting, particularly in evacuable environments where air bearings are ineffective, and struggle with opaque substrates that require transmission techniques.
Innovation Solution
The method involves detecting the relative positions of substrates at multiple positions outside the alignment position with minimal travel paths, using detection devices arranged in pairs to minimize X and Y travel distances, and contacting the substrates solely by moving them in the Z direction, with detection units calibrated to maintain focus without refocusing, allowing for high-precision alignment in vacuum environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If transmission detection is used for face-to-face alignment, then alignment can be achieved for transparent substrates, but it cannot be used for opaque substrates
Solution Approach 1:
The patent replaces optical transmission detection with mechanical contact-based alignment. Instead of using electromagnetic waves to detect alignment marks through transparent substrates, the system brings substrates into direct mechanical contact and uses contact force to achieve alignment, making the method applicable to both transparent and opaque substrates
Solution Approach 2:
The patent changes the detection parameter from optical transmission (electromagnetic wave penetration) to mechanical contact (physical touch). By changing the detection mode from optical to mechanical, the system can detect alignment marks on substrates regardless of their optical properties, solving the limitation for opaque substrates
2Adaptability or versatility
If substrates are moved in evacuable environment, then alignment can be performed in vacuum, but positioning errors increase due to inability to use air bearings
Solution Approach 1:
The patent replaces air bearing-based mechanical support with direct mechanical contact between substrates. Instead of using air cushions to support and position substrates during movement in vacuum, the system uses controlled mechanical contact forces to maintain positioning accuracy, eliminating the need for air bearings in vacuum environments
Solution Approach 2:
The patent introduces contact force as an intermediary mechanism between substrates during vacuum operation. The contact force acts as a mediator that enables precise positioning and alignment without requiring air bearings, allowing the system to maintain manufacturing precision in evacuable environments
3Manufacturing precision
If alignment marks are placed close to substrate edges, then alignment accuracy increases, but detection becomes more difficult
Solution Approach 1:
The patent replaces optical detection of alignment marks with mechanical contact detection. By using direct mechanical contact between substrates at the edges, the system can detect alignment marks located at substrate perimeters without the limitations of optical detection, enabling high alignment accuracy even when marks are positioned at edges
Data Source
Figure 1a~1b
Figure 2a
Figure 2b~2c
AI summary
The invention relates to a method for aligning and contacting a first substrate (15) with a second substrate (15') using several detection units and to a corresponding device.