Substrate Liquid Processing Bubble Imaging for Stable Treatment
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Solution Overview
Problem
It is challenging for engineers to accurately and stably determine the state of bubbles in a processing liquid during substrate liquid-processing, as visual inspection is subjective and prone to individual differences in sensing.
Innovation Solution
A substrate liquid-processing apparatus equipped with an imager and image processor that acquires and processes images of the processing liquid to extract bubble data, allowing for objective determination of the bubble state and adjustment of the processing conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If visual inspection is used to determine bubble state, then the method is simple and requires no additional equipment, but the determination accuracy is low and results vary between individuals
Solution Approach 1:
The patent replaces the mechanical/visual inspection system with an optical imaging system. The imager captures images of the processing liquid, and image processing automatically analyzes bubble states, substituting human visual inspection with automated optical detection and computational analysis.
Solution Approach 2:
The patent introduces an intermediary imaging system between the processing liquid and the observer. The imager acts as an intermediary that captures visual information, and image processing serves as an intermediary that translates visual data into quantitative bubble state measurements, enabling objective and accurate determination.
2Reliability
If image processing is implemented to analyze bubble state, then determination accuracy and stability are improved, but device complexity and processing time increase
Solution Approach 1:
The patent implements a feedback system where the imager continuously monitors the processing liquid, image processing analyzes the captured images to determine bubble states, and the results are used to adjust processing conditions. This closed-loop feedback ensures stable and reliable determination while enabling automatic control.
Solution Approach 2:
The system performs self-monitoring and self-adjustment through automated image capture and processing. The imaging system and image processing algorithm work together to automatically determine bubble states without requiring continuous manual intervention, enabling the system to self-regulate processing conditions based on real-time observations.
Data Source
AI summary
A substrate liquid-processing apparatus includes: a processing tank storing a processing liquid for liquid-processing of a substrate within an inside; an imager configured to acquire an image of the processing liquid of the inside of the processing tank; and an image processor comprising a bubble data acquisitor configured to perform image processing on the image and to acquire bubble data representing the state of bubbles in the processing liquid.