Substrate Container Transfer with Pre-Staging Mount Control
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Solution Overview
Problem
Existing substrate processing apparatuses face inefficiencies in container transfer and processing due to dependency on the usage state of the transport structure, leading to waiting times and reduced processing efficiency.
Innovation Solution
A substrate processing apparatus with a mounting structure for containers, a storage structure, a processing structure, and a controller that manages the transfer and placement of containers regardless of the transport structure's usage state, including an opening/closing mechanism for the container door and a state checker, allowing for efficient transfer and processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the mounting structure waits for the transport structure to be available before accepting a container, then the transport structure can maintain proper sequencing, but the transfer efficiency decreases due to waiting time
Solution Approach 1:
The mounting structure performs preliminary actions by accepting and holding containers before the transport structure is ready. The controller allows the mounting structure to place containers in advance, so that when the transport structure becomes available, containers are already positioned for immediate transfer, eliminating waiting time and improving transfer efficiency.
2Productivity
If the mounting structure accepts containers independently of transport structure status, then transfer efficiency improves, but coordination complexity increases
Solution Approach 1:
The controller serves multiple functions: it manages both the transport structure and the mounting structure, coordinates container placement timing, and monitors the status of both structures. This multi-functional control system enables independent operation of the mounting structure while maintaining proper coordination, resolving the complexity issue.
3Reliability
If the transport structure maintains strict usage state checking, then operational reliability is ensured, but processing speed decreases
Solution Approach 1:
The system performs preliminary container placement on the mounting structure before the transport structure is ready. The controller maintains reliability by checking transport structure status before actual transfer occurs, but the preliminary positioning action allows faster overall processing since containers are ready to be transferred immediately when the transport structure becomes available.
Data Source
AI summary
To accept a subsequent container regardless of a usage state of a transport structure and thereby to improve a transfer efficiency of a container, there is provided a technique that includes: a mounting structure on which a container provided with a door is placed; a storage structure for storing the container; a processing structure; a transport structure for transporting a substrate to the processing structure and including: an opening/closing structure opening or closing the door; and a checker for checking a state of the substrate in the container; a transfer structure for holding the container and transferring the container to the mounting structure, the storage structure and the transport structure; and a controller for controlling the transfer structure to hold the container on the mounting structure and the mounting structure to accept a placement of a subsequent container, regardless of a usage state of the transport structure.