Substrate Container Support Structure for Stable Low-Friction Handling
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Solution Overview
Problem
The increasing dimensions and weight of semiconductor substrates lead to instability in substrate containers, causing contamination risks and excessive adhesion issues during loading and unloading due to large friction areas with loading interfaces.
Innovation Solution
A substrate container design featuring a casing with ribs that form slots and a carrying plane for secure substrate placement, along with a detachable anti-slip tray with a textured guide surface to reduce friction, enhancing stability and ease of handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If substrate dimensions and weight increase, then substrate container dimensions and weight increase, but stability of the substrate container deteriorates
Solution Approach 1:
The support structure is divided into multiple ribs (first rib, second rib, third rib, fourth rib) that are spaced apart to define slots. This segmentation provides distributed support points across the substrate container, improving stability without requiring a solid continuous structure that would add excessive weight.
Solution Approach 2:
Closing portions are added to connect the ribs, creating a three-dimensional rigid framework. The closing portions link the first rib to the second rib and the third rib to the fourth rib, forming a stable spatial structure that resists deformation and enhances overall container stability.
2Weight of moving object
If substrate dimensions increase, then substrate weight increases, but likelihood of particle production during collision increases
Solution Approach 1:
The ribs and closing portions create a cushioning support structure that distributes collision forces across multiple contact points. This prevents concentrated impacts that would generate particles, by absorbing and dispersing the mechanical stress before it reaches the substrate.
Solution Approach 2:
The support structure provides different local characteristics: ribs provide linear support along edges, while closing portions provide point support at corners. This localized quality distribution optimizes protection against particle generation at critical stress points while maintaining overall substrate stability.
3Area of stationary object
If friction area between substrate container and loading interface increases, then adhesion increases, but ease of loading and unloading deteriorates
Solution Approach 1:
The tray is designed as a detachable component that can be separated from the substrate container. This extraction allows the tray to be removed independently, reducing the contact area between the container and loading interface during loading/unloading operations, thereby minimizing adhesion and friction effects.
Solution Approach 2:
The support structure with ribs and closing portions creates a dynamic, lightweight framework that reduces the overall mass and contact pressure of the container. This dynamic design allows for easier manipulation during loading and unloading while maintaining structural integrity when needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design improves substrate stability, reduces contamination risks, and facilitates easier loading and unloading by minimizing friction and adhesion, while maintaining secure substrate positioning.
Implementation Method 1
The guide surface has a texture formed thereon and is adapted for reducing friction between the guide surface and the restriction mechanism
Data Source
AI summary
The invention discloses a substrate container which includes at least one support for substrates. The support has plural ribs distantly separated with each other. The ribs define multiple slots and a carrying plane for receiving a substrate. Each of the ribs has a front end and a rear end. Rear ends of two neighboring ones of the ribs are connected by a closing portion, so that the rear end of a slot defined by the two neighboring ones of the ribs is closed. The closing portion has a concave surface. The concave surface and the carrying plane define a clamping position for substrate confinement.