Substrate Eccentricity Correction via Flat Contact Geometry
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In substrate treatment processes, eccentricity correction is challenging due to notch errors, leading to inaccurate positioning and non-uniform treatment, especially when substrates with notches are involved, resulting in decreased yield and increased error likelihood.
Innovation Solution
A substrate treatment apparatus with an eccentricity correction unit that includes a first contact portion contacting multiple points on the substrate's side surface and a second contact portion with a flat or concave/convex shape to minimize notch error, allowing for precise eccentricity correction without detecting the notch, using drive units to adjust the substrate's position and an elastic portion to provide movement force.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a contact portion with a convex round shape having a large curvature is used for eccentricity correction, then the contact portion can easily contact the substrate, but the notch error increases and exceeds the allowable eccentricity value
Solution Approach 1:
The contact portion is changed from a convex round shape with large curvature to a flat shape. This parameter change in geometry eliminates the notch error that occurred with curved surfaces, allowing accurate eccentricity correction while maintaining ease of contact with the substrate.
2Manufacturing precision
If eccentricity measurement and correction is performed on a periphery excluding the notch, then accurate correction can be achieved, but the control process becomes complex requiring notch detection and avoidance
Solution Approach 1:
The notch is effectively removed from the equation by using a flat contact portion that contacts the substrate at a point远离 the notch. This extraction of the notch's influence eliminates the need for complex detection and avoidance control, simplifying the overall process while maintaining precision.
Solution Approach 2:
The flat contact portion automatically finds its contact point on the substrate without requiring active detection or control mechanisms to avoid the notch. The geometry of the flat contact portion ensures it contacts the substrate at a stable point, making the system self-correcting and eliminating complex control requirements.
3Manufacturing precision
If a flat contact portion is used instead of a convex round shape, then notch error is minimized, but the contact area with the substrate changes
Solution Approach 1:
The contact portion geometry is changed from convex round to flat. This parameter change optimizes the contact characteristics by providing a stable contact point that minimizes notch error while maintaining sufficient contact area for effective eccentricity correction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables reliable and accurate eccentricity correction, minimizing notch errors and improving the uniformity of substrate treatment, even when notches are present, by allowing the substrate to be aligned within an error range without specific notch detection, thus enhancing the reliability and precision of the apparatus.
Implementation Method 1
an elastic portion configured to provide elastic force in a direction of movement of the second contact portion to press or depressurize the substrate
Data Source
AI summary
A substrate treatment apparatus including an eccentricity correction unit correcting eccentricity of a substrate supported by a support unit, the substrate treatment apparatus includes a first correction unit including a first contact portion in contact with a plurality of points of a side surface of the substrate having a notch formed in a periphery thereof, and a first drive unit configured to move a position of the substrate such that a center of the substrate corresponds to a center of the support unit, and a second correction unit including a second contact portion in contact with the other side surface of the substrate having the notch formed in the periphery thereof, a second drive unit configured to change a position of the second contact portion, and an elastic portion configured to provide elastic force in a direction of movement of the second contact portion to press or depressurize the substrate.