Substrate Edge Alignment for Faster Film Forming Detection

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Solution Overview

Problem

In film forming processes for semiconductor devices and liquid crystal display devices, the variation in substrate edge position can lead to prolonged detection times, reducing throughput due to the need for multiple point detection by detection units.

Innovation Solution

A film forming apparatus with first and second detection units and a control unit that utilizes information from the first detection unit to quickly align and position the substrate, allowing the second detection unit to efficiently detect the edge, thereby reducing the number of detection points required.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the detection unit detects the substrate edge based on multiple point detection, then the detection accuracy is improved, but the detection time increases

Engineering Contradiction:

Improveedge position detection accuracyVSAvoiddetection time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The first detection unit performs preliminary detection of the substrate edge position before the main forming process. This preliminary detection provides advance information about the substrate edge location, allowing the system to pre-position the substrate or adjust the detection parameters, thereby reducing the time required for subsequent precise detection by the second detection unit while maintaining detection accuracy.

Inventive Principle:

Principle #10Preliminary action

2Reliability

If the substrate edge position varies, then the detection robustness is improved, but the throughput decreases

Engineering Contradiction:

Improvedetection robustnessVSAvoidthroughput

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The system uses feedback from the first detection unit to dynamically adjust the detection parameters and substrate positioning for the second detection unit. This feedback mechanism allows the system to adapt to variations in substrate edge position, maintaining robust detection accuracy while minimizing the time spent on detection, thereby preserving throughput despite substrate variations.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

By performing preliminary detection of substrate edge position variations before the main process, the system can pre-adjust positioning and detection parameters, ensuring robust detection regardless of substrate variations while minimizing detection time and maintaining high throughput.

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS20260036907A1Film forming apparatus, alignment method, storage medium, and manufacturing method for article

Publication Date: 2026.02.05 CANON KK

AI summary

A film forming apparatus that brings a curable composition on a substrate and a member into contact with each other to form a film of the curable composition includes a first unit including a first detection unit configured to detect an edge of the substrate, a second unit including a second detection unit configured to detect an edge of the substrate and a driving unit configured to drive at least one of the substrate and the second detection unit, a conveyance unit configured to convey the substrate from the first unit to the second unit; and a control unit configured to control the driving unit, wherein the control unit controls the driving unit based on information about a position of the edge of the substrate acquired from a detection result of the first detection unit.