Substrate End-Effector With Floating Clamp for Precise Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing end-effectors for handling substrates in lithographic apparatuses require precise alignment, which is costly, complex, and can lead to wafer damage due to inaccurate positioning, and additional actuators introduce heat dissipation issues.
Innovation Solution
An end-effector with a clamping body that can move relative to a base within a predetermined range, using a guidance mechanism with spring elements and a fixation mechanism controlled by vacuum lines, allowing for precise positioning without bulky actuators.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a fixed position end-effector is used, then positioning precision can be improved with additional actuators, but device complexity and cost increase
Solution Approach 1:
The end-effector transitions from a fixed position design to a dynamic design where the clamping body can move relative to the base within a predetermined range. This movement capability allows the system to achieve positioning precision through motion adaptation rather than through complex actuator systems, directly resolving the contradiction between positioning precision and device complexity.
2Measurement precision
If additional actuators are added to improve positioning precision, then positioning accuracy improves, but heat dissipation increases
Solution Approach 1:
The dynamic movement of the clamping body relative to the base eliminates the need for additional actuators that would generate heat. The system achieves positioning accuracy through the guided movement capability rather than through actuated adjustment mechanisms, thereby preventing heat dissipation issues.
3Device complexity
If a fixed position end-effector is used, then structural simplicity is maintained, but positioning accuracy deteriorates due to substrate eccentricity
Solution Approach 1:
The end-effector incorporates a dynamic clamping body that can move within a predetermined range relative to the base, guided by a guidance mechanism. This dynamic capability allows the system to adapt to substrate eccentricity and maintain positioning accuracy while preserving relatively simple structure through the use of spring elements and vacuum-based fixation rather than complex actuator systems.
4Device complexity
If the clamping body is fixed relative to the base, then device simplicity is maintained, but adaptability to substrate variations deteriorates
Solution Approach 1:
The clamping body is designed to move dynamically relative to the base within a predetermined range, enabling adaptation to substrate variations such as eccentricity. The guidance mechanism with spring elements provides this adaptability while maintaining device simplicity through passive mechanical guidance rather than active control systems.
Solution Approach 2:
The spring elements in the guidance mechanism automatically adjust the position of the clamping body to accommodate substrate variations. The system self-regulates through the elastic deformation of springs and vacuum pressure adjustments, eliminating the need for complex sensors or control algorithms to achieve adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves positioning accuracy and reduces complexity and cost by allowing the clamping body to adapt to substrate eccentricity, maintaining precise alignment and reducing heat dissipation.
Implementation Method 1
The guidance mechanism may comprise at least one spring element (42, 44, 46), each spring element having one end connected to the base (BA) and an opposite end connected to the clamping body (CB)
Implementation Method 2
The fixation mechanism (50) may be connected to at least one vacuum line (52)
Data Source
AI summary
An end-effector is disclosed for handling a substrate, comprising: a base; a clamping body comprising an actuator configured to switch between a first position, wherein the substrate is fixed in position with respect to the clamping body, and a second position, wherein the substrate is released; a guidance mechanism connecting the clamping body to the base while allowing freedom of movement of the clamping body relative to the base within a predetermined range of motion; and a fixation mechanism for switching a connection between the clamping body and the base between a fixed position, wherein the clamping body is fixated relative to the base, and a free position, wherein the clamping body can move relative to the base.