Substrate Fixture Tray with Yttrium Oxide Layer for Plasma Erosion Resistance

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Solution Overview

Problem

The existing substrate fixing devices using electrostatic chucks face challenges in reducing manufacturing costs, particularly due to the need for re-preparing the insulated plate when substrate shapes or sizes change, and the insufficient adsorption force of the tray, leading to non-uniform etching rates and increased costs.

Innovation Solution

A substrate fixture with a monopolar chuck main body and a tray having a volume resistivity equal to or lower than the insulated plate, combined with a yttrium oxide layer on the tray's surface to enhance adsorption force and protect it from plasma erosion, allowing for flexible substrate accommodation without re-preparing the insulated plate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the insulated plate is re-prepared for different substrate shapes and sizes, then the substrate fixture can accommodate various substrates, but the manufacturing cost increases

Engineering Contradiction:

Improvesubstrate accommodation flexibilityVSAvoidmanufacturing cost

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The substrate fixture is divided into two functional parts: a reusable insulated plate with embedded electrodes and a replaceable tray with concave parts. The tray is segmented to accommodate different substrate configurations, allowing flexibility without modifying the expensive insulated plate structure

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The tray is designed as a lower-cost, replaceable component compared to the insulated plate. When substrate specifications change, only the tray needs to be replaced rather than the entire insulated plate, reducing manufacturing costs while maintaining adaptability

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

2Reliability

If the tray is made with high volume resistivity to match the insulated plate, then insulation performance is improved, but the adsorption force of the substrate to the tray decreases

Engineering Contradiction:

Improveinsulation performanceVSAvoidadsorption force

Core Design Contradiction:

ReliabilityVSForce

Solution Approach 1:

The volume resistivity of the tray is deliberately set to be equal to or lower than the insulated plate to optimize adsorption force. This parameter change ensures sufficient electrostatic attraction between the substrate and tray while the insulated plate maintains its high resistivity for insulation purposes

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

Different parts of the fixture have different electrical properties optimized for their specific functions: the insulated plate maintains high volume resistivity for electrical insulation, while the tray has lower volume resistivity to enhance substrate adsorption force through electrostatic attraction

Inventive Principle:

Principle #3Local quality

3Productivity

If the tray is exposed to plasma atmosphere without protection, then the plasma processing can proceed, but the tray lifespan is reduced due to plasma erosion

Engineering Contradiction:

Improveplasma processing capabilityVSAvoidtray lifespan

Core Design Contradiction:

ProductivityVSDuration of action of stationary object

Solution Approach 1:

The tray is constructed using composite materials or coatings that provide resistance to plasma erosion while maintaining the necessary electrical and mechanical properties for substrate fixation during plasma processing

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The tray is designed with material properties and structural features that provide beforehand protection against plasma erosion, cushioning the tray against damage and extending its operational lifespan in the plasma environment

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces manufacturing costs by allowing the tray to be re-prepared for different substrate sizes without re-preparing the insulated plate, while maintaining sufficient adsorption force for uniform substrate handling and extending the tray's lifespan through plasma protection.

Implementation Method 1

the yttrium oxide layer is formed on the upper surface of the tray, so that it is possible to protect the tray from the plasma atmosphere

Methodology Applied

Scientific EffectPlasma erosion: Erosion

Implementation Method 2

The electrostatic chuck has functions of fixing a substrate by an electrostatic force

Methodology Applied

Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentUS10600669B2Substrate fixture and substrate fixing device

Publication Date: 2020.03.24 SHINKO ELECTRIC IND CO LTD

AI summary

A substrate fixture includes a monopolar chuck main body comprising an insulated plate and an electrode embedded in the insulated plate, a tray placed on the chuck main body, having an upper surface in which a plurality of concave parts for accommodating therein a plurality of substrates is formed, and formed of an insulator having a volume resistivity equal to or lower than a volume resistivity of the insulated plate, and an yttrium oxide layer formed on the upper surface of the tray.