Substrate Process Flow Flags for Flexible Site Sequence Control

The patent segments the process control into multiple independent process flows, each with its own process flag. Instead of using one large process flag to track all cycles, the system divides the control into separate process flow identifiers (e.g., first process flow, second process flow) with individual flags for each. This segmentation allows the system to handle multiple cycles without increasing the complexity of a single process flag, as each process flow can be independently controlled and tracked.

The patent implements a dynamic process control system where process flows and their associated flags can be configured and modified without changing the underlying program source code. The system uses a configurable process flow definition mechanism that allows operators to add, remove, or modify process flows and their corresponding flags through configuration files or database entries rather than code changes. This dynamic approach enables the system to adapt to process modifications while maintaining the same control framework.

The patent prepares reworking capability in advance by designing a process flag system that inherently supports rework scenarios. Each process flow is pre-configured with its own process flag, and the system includes predefined logic for handling rework situations. When reworking is needed, the system can reset or modify the appropriate process flag for the specific process flow without requiring complex conditional logic or bit manipulation, as each process flow's rework handling is independently prepared and configured.