Substrate Gripping Mechanism State Recognition via Interlocking Member
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Solution Overview
Problem
Existing substrate gripping mechanisms struggle to accurately recognize the open, gripping, missing, and running states, leading to issues like substrate falling and scratches due to the inability to reliably determine the gripping state, and the limited space in substrate transfer devices makes it difficult to install multiple sensors.
Innovation Solution
A substrate gripping mechanism using a reciprocating movable clamp portion with an interlocking member and two sensors (first and second sensors) with distinct detection regions, allowing for accurate recognition of the four states without requiring a large number of components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple sensors are provided to accurately recognize all states (open, gripping, missing, running), then the state recognition accuracy is improved, but the device complexity and space requirements increase
Solution Approach 1:
The patent combines multiple detection functions into a single sensor by using an interlocking member with four different portions that present different detection profiles to the sensor. This allows one sensor to distinguish between open state, gripping state, missing state, and running state based on which portions are detected, thereby reducing the number of sensors from four to one while maintaining accurate state recognition
Solution Approach 2:
The interlocking member serves multiple functions: it mechanically connects the movable clamp portion to the substrate, and simultaneously acts as a multi-state indicator for the sensor. The four different portions of the interlocking member enable a single sensor to universally detect all four operational states, eliminating the need for separate sensors for each state
2Measurement precision
If four sensors are installed to detect all states, then the state recognition accuracy is improved, but the installation space requirement increases
Solution Approach 1:
The patent merges the detection functions of four separate sensors into a single sensor by designing the interlocking member with four distinct portions. Each portion corresponds to a specific operational state, allowing one sensor to replace four sensors and significantly reduce the installation space required in the substrate transfer device
3Reliability
If the substrate transfer operation is started from the open state, then the safety is improved, but the throughput decreases
Solution Approach 1:
The patent implements feedback control by using the sensor to detect the actual state of the substrate gripping mechanism through the interlocking member. The control unit receives detection results and determines the current state, enabling the system to safely start transfer operations from the running state when confirmed, rather than always from the open state. This feedback mechanism ensures substrate safety while maximizing throughput by eliminating unnecessary waiting time
Data Source
AI summary
A substrate gripping mechanism, for gripping a substrate between a fixed clamp portion to be engaged with an edge portion of a substrate and a movable clamp portion configured to reciprocate with respect to the fixed clamp portion by a reciprocating driving unit, includes an interlocking member configured to move together with the movable clamp portion, and a first sensor and a second sensor, each having a detection region and configured to detect whether or not the interlocking member exists in the detection region. The interlocking member has a first to a fourth portion connected in a reciprocating direction of the movable clamp portion. The first to the fourth portion have shapes to make detection results thereof by the first sensor and the second sensor different from each other.