Substrate Processing Ground Bar Layout for Stable ESD Grounding
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Solution Overview
Problem
In substrate processing systems, especially those using processing liquids, it is challenging to maintain a stable reference ground level while handling electrostatic discharge (ESD) due to the need to prevent corrosion of steel frames, which requires physical separation of electrical and charged components from the frame, complicating the grounding structure.
Innovation Solution
The system employs separate ground bars connected to the building ground, with one set exclusively for electrical components and another for charged components, allowing for physical separation and independent management of electrostatic discharge paths to maintain a stable reference ground level.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a coated steel material is used for the frame to prevent corrosion, then corrosion resistance is improved, but electrical components cannot be directly connected to the frame
Solution Approach 1:
The grounding structure is segmented into multiple separate ground bars (first ground bar, second ground bar) instead of using a single unified grounding path through the frame. This allows independent connection paths for electrical components and charged components, resolving the contradiction by maintaining frame coating integrity while providing direct grounding access.
Solution Approach 2:
Ground bars serve as intermediary elements that provide direct grounding connection without requiring direct contact with the coated frame. These intermediaries bridge the gap between the insulated frame and electrical components, enabling grounding while preserving the protective coating.
2Device complexity
If electrical components are directly connected to the frame, then grounding is simplified, but corrosion occurs due to processing liquid contact
Solution Approach 1:
The grounding system is divided into separate ground bars positioned away from the coated frame, creating distinct grounding zones. This segmentation prevents processing liquid from creating corrosive electrochemical cells at grounding connection points while maintaining simple grounding paths.
3Reliability
If separate ground bars are used for electrical and charged components, then electrostatic discharge impact on electrical components is reduced, but the grounding structure becomes more complex
Solution Approach 1:
The grounding system is segmented into at least two separate ground bars: a first ground bar for electrical components and a second ground bar for charged components. This physical separation creates independent grounding paths that prevent electrostatic discharge from charged components from affecting electrical components, while the segmented structure remains manageable through systematic arrangement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively stabilizes the reference ground level of electrical components, minimizing the impact of electrostatic discharge on the electrical components and preventing corrosion, thus ensuring safe and proper operation of the substrate processing system.
Implementation Method 1
the second ground bar is connected to a first charged component to set a path of an electrostatic discharge current generated by the first charged component
Data Source
AI summary
A substrate processing system capable of setting a stable reference ground level for electrical components while handling electrostatic discharge (ESD) is provided. The substrate processing system includes a first ground bar connected to a building ground; and a second ground bar connected to the building ground and physically separated from the first ground bar, wherein the first ground bar is connected to a first electrical component to set a ground level of the first electrical component, wherein the second ground bar is dedicated to a charged component, and the second ground bar is connected to the first charged component to set a path of the electrostatic discharge current generated by the first charged component.