Substrate Transport Hand Positioning via Offset Engagement

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Solution Overview

Problem

Conventional substrate processing apparatuses require lengthy startup and maintenance times due to manual visual teaching of substrate transfer positions, which are prone to variations in accuracy depending on operator skill and experience.

Innovation Solution

A substrate transport system with a hand movable along multiple axes, utilizing permanently mounted positioning members and a control unit to store and adjust position coordinates, allowing for precise and rapid teaching of substrate transfer positions without human intervention.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual visual teaching is used to teach substrate transfer position, then the system can be operated, but startup and maintenance times become lengthy and accuracy varies depending on operator skill

Engineering Contradiction:

Improvesubstrate transfer position accuracyVSAvoidstartup and maintenance time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces manual visual teaching with an automated optical detection system. A camera captures images of the substrate transfer position, and image processing algorithms automatically determine the position coordinates, eliminating the need for manual visual measurement and thereby reducing both time and human error.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system performs self-teaching by automatically capturing images of the substrate transfer position and processing these images to determine position coordinates without requiring external manual intervention. The apparatus teaches itself the correct positions through automated image recognition and processing.

Inventive Principle:

Principle #25Self-service

2Measurement precision

If positioning members are permanently mounted to enable automatic positioning, then positioning accuracy improves, but the hand cannot access the substrate transfer position due to physical interference

Engineering Contradiction:

Improvepositioning accuracyVSAvoidhand accessibility to substrate transfer position

Core Design Contradiction:

Measurement precisionVSEase of operation

Solution Approach 1:

The patent positions the camera and positioning members in three-dimensional space such that the camera observes the substrate transfer position from above, while the hand approaches from a different spatial angle. This dimensional separation allows the positioning members to remain permanently mounted without interfering with the hand's access to the substrate transfer position.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The camera acts as an intermediary that detects the substrate transfer position without requiring physical contact. The positioning members guide the hand's movement, while the camera independently measures the position, separating the functions of positioning and measurement to avoid physical interference.

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS10818531B2Substrate transport system, substrate processing apparatus, hand position adjustment method

Publication Date: 2020.10.27 EBARA CORP

AI summary

A substrate transport system includes a hand, a main positioning member permanently mounted on a base, where the main positioning member is engageable with the hand at a position offset by a first distance in the first axis direction and offset by a second distance in the second axis direction from a substrate transfer position, and a control unit that stores a position coordinate in the first axis direction and a position coordinate in the second axis direction of the hand in a state where the hand is positioned by being engaged with the main positioning member.