Substrate Heater Filter Circuit With Ferrite Core Temperature Control
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Solution Overview
Problem
Existing substrate temperature controlling apparatuses for multi-zone substrates require large facilities and increased process environment changes due to the number of controllers and filters needed, which goes against the trend of reducing facility volume and stability.
Innovation Solution
A substrate treating apparatus with a substrate temperature control unit that includes a ferrite core and air cores to filter signals, a power supply part, and a cooling system to maintain the ferrite core temperature between 50 to 100 degrees Celsius, reducing the influence on the process environment and facility size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a plurality of controllers and filters are provided for controlling heaters in multi-zone substrates, then temperature control capability is improved, but facility volume increases significantly (30 or more times)
Solution Approach 1:
Multiple controllers and filters are merged into a single integrated controller with integrated filtering capability. The controller includes multiple heating unit control circuits that can independently control different zones, and an integrated filter that processes signals for all heating units, eliminating the need for separate controllers and filters for each zone.
Solution Approach 2:
The integrated controller serves multiple functions: it controls multiple heating units independently for multi-zone temperature control, provides signal filtering for all heating units through the integrated filter, and manages power distribution. This multi-functional design replaces what would traditionally require separate dedicated devices for each function.
2Manufacturing precision
If a plurality of controllers and filters are provided for controlling heaters, then temperature control precision is improved, but process environment stability deteriorates due to increased influence on the process
Solution Approach 1:
Multiple filters are merged into a single integrated filter within the controller. This integrated filter processes signals for all heating units simultaneously, reducing the total number of filter components from many separate filters to one unified filtering system, thereby minimizing the cumulative influence on the process environment.
Solution Approach 2:
The integrated filter acts as a central intermediary that processes and conditions signals before they reach the heating units. By providing a single point of signal conditioning for all zones, it ensures uniform signal quality and reduces the cumulative impact of multiple separate filter components on the process environment.
3Adaptability or versatility
If 100 or more heating units are provided for multi-zone substrates, then temperature control adaptability is improved, but device complexity increases
Solution Approach 1:
Multiple independent control circuits are merged into a single integrated controller with a unified control architecture. The controller includes multiple heating unit control circuits that can independently regulate different zones, but they are all managed from a single device rather than requiring separate controllers for each heating unit.
Solution Approach 2:
The integrated controller provides universal control capability for multiple heating units through a single device. It includes power supply circuits that can distribute power to multiple heating units, control circuits that can independently regulate each zone, and an integrated filter that serves all heating units, creating a multi-functional system that reduces overall complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively controls the substrate temperature while minimizing the impact on the process environment and reducing the size of the facility, maintaining a stable temperature range for the ferrite core and substrate.
Implementation Method 1
a ferrite core which interrupts a low-frequency signal introduced to the power supply part
Implementation Method 2
a plurality of air cores which interrupt a high-frequency signal introduced into the power supply part
Implementation Method 3
a plasma generating unit which excites the gas in in the interior of the chamber into a plasma state
Implementation Method 4
The ferrite core cooling part may include a plurality of cooling fans installed around the ferrite core
Data Source
AI summary
Disclosed is a substrate treating apparatus, which includes a chamber having a space for treating a substrate in an interior thereof, a substrate support assembly including a support plate situated in the chamber and which supports the substrate, a gas supply unit which supplies a gas into the interior of the chamber, a plasma generating unit which excites the gas in in the interior of the chamber into a plasma state, and a substrate temperature control unit which controls a temperature of the substrate, and the substrate temperature control unit includes a plurality of heaters installed in different areas of the support plate, a power supply part which supplies electric power to the plurality of heaters, a ferrite core which interrupts a low-frequency signal introduced to the power supply part, and a plurality of air cores which interrupts a high-frequency signal introduced into the power supply part.