Substrate Holder Centering Pin Stop for Precise Plating Alignment
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Solution Overview
Problem
In existing substrate holders, deviations in the first and second holding members due to clearance can cause the positioning member to push the substrate further toward the center than intended, leading to misalignment and improper power supply contact.
Innovation Solution
A substrate holder with a centering pin that moves from a second to a first position to contact the substrate's peripheral edge, biased by a driving member and stopped by a stopper, ensuring precise positioning and contact alignment, even with deviations in the holding members.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If clearance is provided between the first holding member and second holding member to prevent interference, then the two members can be engaged, but the first holding member deviates from the designed position relative to the second holding member
Solution Approach 1:
A positioning member is introduced as an intermediary element between the first holding member and substrate. This positioning member has a positioning protrusion that fits into a positioning groove on the substrate, providing a precise reference position that compensates for the clearance-induced deviation of the first holding member, thereby ensuring accurate substrate positioning despite the clearance between holding members
Solution Approach 2:
The design changes the positioning mechanism from direct contact between holding members to a positioning member-mediated system with specific geometric parameters (protrusion and groove dimensions). By carefully designing the positioning protrusion and groove parameters, the system achieves precise substrate positioning that is independent of the clearance between holding members
2Manufacturing precision
If the protrusion contacts the positioning member to move it to position the substrate, then the substrate is positioned, but if the first holding member deviates due to clearance, the positioning member is pushed excessively closer to the center of the substrate
Solution Approach 1:
The positioning member serves as a mediator that decouples the positioning function from the holding function. The positioning protrusion on the positioning member fits into the positioning groove on the substrate, creating a reliable positioning mechanism that is not affected by the deviation of the first holding member, thereby ensuring both positioning accuracy and stability
Solution Approach 2:
The system is segmented into distinct functional components: the first holding member for clamping, the positioning member for positioning, and the substrate. This segmentation allows each component to perform its specific function independently, so that deviations in the holding member do not affect the positioning accuracy provided by the positioning member
3Manufacturing precision
If the positioning member pushes the substrate farther toward the center than the designed position, then the substrate position relative to the second holding member changes, but the power supply contacts cannot contact the predetermined location of the substrate
Solution Approach 1:
The positioning member with its positioning protrusion and groove interface acts as a reliable mediator that ensures the substrate is positioned at the correct location relative to the second holding member. This accurate positioning ensures that the power supply contacts on the second holding member can reliably contact the predetermined location on the substrate, maintaining both positioning control and electrical connection reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents the substrate from being pushed further than the designed position, maintaining accurate alignment and power contact, thereby preventing misalignment and damage, and ensuring uniform plating.
Implementation Method 1
the driving member is configured to bias the centering pin toward the first position
Data Source
AI summary
The present disclosure provides a substrate holder including a centering pin that does not push a substrate any farther toward the center than a designed position, even if a first holding member deviates from the designed position relative to a second holding member, when positioning the substrate. The substrate holder according to the present disclosure includes the first holding member and the second holding member. The second holding member includes a positioning member for positioning the substrate at a predetermined position, and a stopper. The positioning member includes the centering pin movable between a first position and a second position, and is configured so that, when the centering pin moves from the second position to the first position, the centering pin contacts a peripheral edge of the substrate to position the substrate at the predetermined position. The first holding member includes a driving member configured to bias the centering pin toward the first position, when the first holding member and the second holding member hold the substrate. The stopper is configured to contact the centering pin to stop the centering pin at the first position.