Substrate Holding Apparatus Selective Holder Detachment
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Solution Overview
Problem
Existing substrate holding apparatuses require complete disassembly for maintenance or replacement of holders, even when only some holders need to be detached, leading to inefficiencies in maintenance processes.
Innovation Solution
The substrate holding apparatus features a base with holders aligned in a predetermined direction, allowing for detachability in parallel with a reference plane crossing the alignment direction, enabling individual holder attachment and detachment without disassembling the entire apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If holders are attached to the pitch conversion mechanism in aligned order from the bottom, then the substrate holding apparatus can hold and deliver substrates, but it becomes necessary to detach all holders or disassemble the entire apparatus when maintaining or replacing only some holders
Solution Approach 1:
The pitch conversion mechanism is divided into multiple detachable attachment units, each capable of holding one or more holders. This segmentation allows individual units to be detached and replaced independently, eliminating the need to disassemble the entire apparatus when maintaining specific holders.
Solution Approach 2:
The attachment units are designed with dynamic attachment and detachment capabilities, allowing them to be easily connected and disconnected from the pitch conversion mechanism. This dynamic design enables flexible maintenance operations where only the necessary attachment units need to be accessed.
2Ease of repair
If the entire substrate holding apparatus must be disassembled for holder maintenance, then all holders can be accessed, but maintenance time and operational efficiency are reduced
Solution Approach 1:
By segmenting the apparatus into independent attachment units that can be accessed individually, maintenance personnel can quickly locate and service specific holders without time-consuming complete disassembly. Only the relevant attachment unit needs to be detached for maintenance.
Solution Approach 2:
The attachment units are designed to be extractable from the pitch conversion mechanism as complete modules. This extraction capability allows rapid removal of specific units containing the holders that need maintenance, significantly reducing overall maintenance time.
Data Source
AI summary
A substrate holding apparatus includes a base and holders attached to the base to hold substrates. The holders is aligned in a predetermined alignment direction, and is attached to the base so as to be detachable in parallel with a reference plane as a plane crossing the alignment direction.