Substrate Holder Positioning Member for Plating Uniformity

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional substrate holders using plate springs for positioning semiconductor wafers face challenges in achieving accurate and uniform centering due to non-uniform elastic force, leading to potential substrate damage and inconsistent plating film uniformity, especially with repeated use and metal fatigue.

Innovation Solution

A substrate holder design that eliminates the use of plate springs by employing a positioning member that moves between two positions, driven by a rigid member, allowing for precise positioning without elastic force, formed from materials like aromatic polyether ketone for enhanced rigidity and durability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If plate springs are used for positioning the substrate, then the substrate can be centered by elastic force, but the elastic force is non-uniform leading to poor positioning accuracy and potential substrate damage

Engineering Contradiction:

Improvecentering mechanismVSAvoidpositioning accuracy

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The invention extracts and eliminates the plate spring component from the positioning system. By removing the elastic element, the design avoids the non-uniform elastic force problem entirely and replaces it with a rigid positioning structure that provides consistent, controllable positioning force without risking substrate damage.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The invention substitutes the mechanical elastic force system (plate springs) with a rigid mechanical positioning system. The rigid positioning member provides deterministic positioning through geometric constraints rather than elastic deformation, eliminating the variability inherent in spring-based systems.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Ease of operation

If plate springs are used for positioning, then centering can be achieved, but metal fatigue occurs with repeated use reducing reliability

Engineering Contradiction:

Improvecentering mechanismVSAvoiddurability

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The invention removes the plate spring component that is susceptible to metal fatigue. By eliminating the elastic element entirely and using a rigid positioning structure, the design removes the source of fatigue-related reliability problems while maintaining the centering function.

Inventive Principle:

Principle #2Taking out (Extraction)

3Manufacturing precision

If high rigidity plate springs are used for better positioning performance, then positioning accuracy improves, but the load on substrate increases risking damage

Engineering Contradiction:

Improvepositioning accuracyVSAvoidsubstrate damage risk

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The invention replaces the elastic mechanical system with a rigid positioning system that uses geometric constraints and controlled contact forces. This allows for precise positioning without relying on elastic deformation, enabling better control over the magnitude and distribution of forces applied to the substrate, thereby reducing damage risk.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

4Ease of operation

If plate springs are used for positioning, then centering can be performed, but the holder size increases reducing compactness

Engineering Contradiction:

Improvecentering mechanismVSAvoidholder size

Core Design Contradiction:

Ease of operationVSVolume of moving object

Solution Approach 1:

The invention extracts the plate spring component and replaces it with a more compact rigid positioning structure. This elimination of the elastic element and its associated mechanisms allows for a more space-efficient design that achieves the same centering function in a smaller volume.

Inventive Principle:

Principle #2Taking out (Extraction)

Data Source

PatentUS10793967B2Substrate holder and plating apparatus using the same

Publication Date: 2020.10.06 EBARA CORP

AI summary

A substrate holder has a first holding member having a first surface configured to contact with a substrate, and a second holding member for sandwiching and holding the substrate together with the first holding member. The first holding member has a positioning member for positioning the substrate in contact with the first surface at a prescribed position of the first surface. The positioning member is configured to move between a first position where the substrate is to be positioned at the prescribed position of the first surface, in contact with a peripheral edge part of the substrate, and a second position not in contact with the substrate. The second holding member has a driving member configured to cause the positioning member to be positioned at the first position, at the time when holding the substrate by the first holding member and the second holding member.