Substrate Holder with Multi-Position Power Supply for Plating
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Solution Overview
Problem
The existing plating apparatus requires multiple substrate holders for different types of substrates, leading to increased installation area and operational complexity due to the need for selective substrate holder handling.
Innovation Solution
A substrate holder with a first and second power supply member, where the first power supply member end part extends toward the inside of the substrate holding surface at a central position, and the second power supply member end part extends at a radial outer position, allowing power supply to multiple types of substrates without the need for multiple holders, and enabling separable and uniformly distributed contact points for consistent plating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple substrate holders are used for different substrate types, then power supply adaptability to various substrates is improved, but the number of substrate holders increases leading to larger installation area
Solution Approach 1:
The substrate holder is designed with multiple power supply members (first, second, and third power supply members) that can contact different regions of substrates with varying properties. This allows a single substrate holder to perform multiple functions by selectively contacting different substrate types at appropriate positions, eliminating the need for multiple specialized substrate holders and reducing installation area.
Solution Approach 2:
The power supply function is segmented into multiple independent power supply members positioned at different locations on the substrate holder. Each power supply member can independently contact different substrate types, allowing the system to adapt to various substrate properties while using a single integrated holder structure.
2Adaptability or versatility
If multiple substrate holders are used for different substrate types, then power supply adaptability to various substrates is improved, but operational complexity increases due to selective substrate holder handling
Solution Approach 1:
The substrate holder incorporates multiple power supply members that can adapt to different substrate types without requiring operator intervention to select different holders. The system achieves universality by having all power supply members available on a single holder, automatically accommodating various substrate properties through appropriate contact selection.
Solution Approach 2:
The substrate holder employs movable or selectively engageable power supply members that can dynamically adapt to different substrate types. This dynamic capability allows the system to switch between different power supply contact configurations without manual intervention, simplifying operation while maintaining adaptability.
3Adaptability or versatility
If power supply members are positioned at different locations, then adaptability to different substrate types is improved, but current distribution uniformity may be affected
Solution Approach 1:
Different power supply members are positioned at specific locations optimized for different substrate types. The first power supply member contacts the center region, the second contacts intermediate regions, and the third contacts outer regions. This local quality approach ensures that each power supply member is positioned to provide optimal current distribution for its intended substrate type, maintaining manufacturing precision while achieving adaptability.
Solution Approach 2:
The system changes operational parameters by selectively engaging different power supply members based on substrate type. When processing different substrate types, the appropriate power supply member is activated, changing the electrical contact parameters to match the substrate requirements, thereby maintaining current distribution uniformity across various substrate types.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces the number of substrate holders required, minimizes the installation area, simplifies operation, and ensures uniform current distribution and film quality across various substrate types.
Implementation Method 1
the substrate holder is provided with an electrical contact for electrically connecting an external wiring line extending from the power source and the substrate with each other. The electrical contact is configured to contact with a seed layer (conductive layer) formed on the surface of the substrate to thereby apply a negative voltage to the substrate.
Data Source
AI summary
A substrate holder according to the present invention comprises a first power supply member and a second power supply member which allow power to be supplied to substrates having different properties. The first power supply member comprises a first power supply member end part which extends toward the inside of a substrate holding surface and is disposed at a first position of the substrate holding surface. The second power supply member comprises a second power supply member end part which extends toward the inside of the substrate holding surface and is disposed at a second position of the substrate holding surface. The first position is located on the center side of the substrate holding surface relative to the second position.