Substrate Holding Apparatus Protrusion Design
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Large or soft substrates are difficult to handle due to warping and potential damage during transportation, as existing substrate holding apparatuses either require multiple suction sections or contact the substrate's edge, leading to uneven attraction and risk of damage.
Innovation Solution
A substrate holding apparatus with a grasp module to contact the edge and a suction module to attract the central plated area, featuring a protrusion at the plated area position to maintain appropriate distance and prevent damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the number of suction sections is increased or suction power is increased to support large substrates, then the substrate can be held securely, but the device complexity and energy consumption increase
Solution Approach 1:
A support protrusion is introduced as an intermediary element between the substrate and the suction module. The protrusion contacts the back surface of the substrate at a position away from the edge, providing mechanical support that prevents warping and sagging. This allows the suction module to operate at a greater distance from the substrate while maintaining secure holding, thereby reducing the number of suction sections needed and simplifying the device structure.
2Reliability
If the substrate is held by grasping the edge portion and attracting the central area by suction, then the substrate can be held stably, but the substrate may undulate or warp causing contact with the holding apparatus or damage
Solution Approach 1:
The support protrusion acts as a mediator that provides localized support to the substrate back surface. By positioning the protrusion to contact the substrate at an appropriate location, it prevents excessive flexing and undulation of soft substrates during transport, eliminating the harmful effects of warping while maintaining the benefits of edge grasping and central suction.
3Power
If the suction module is positioned closer to the substrate to improve suction effectiveness, then the substrate can be attracted more strongly, but the substrate may come into contact with the suction module causing damage
Solution Approach 1:
The support protrusion serves as a protective intermediary that contacts the substrate back surface first, creating a physical barrier that prevents the substrate from contacting the suction module front surface. This allows the suction module to be positioned at an optimal distance for effective attraction without risking substrate damage from direct contact.
4Reliability
If the substrate is grasped at the edge portion for transport, then the substrate can be held securely, but the central area may hang down causing contact with components and potential damage
Solution Approach 1:
The support protrusion is positioned to contact the substrate back surface at a location that prevents the central area from sagging downward. This intermediary support element distributes the substrate weight and maintains proper positioning, preventing the central area from contacting other components during transport while preserving secure edge grasping.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus securely holds and transports substrates without warping or damage, ensuring proper suction and preventing contact with the suction module, thus maintaining substrate integrity.
Implementation Method 1
a suction module to attract the portion to be plated of the substrate by suction to hold the portion to be plated
Data Source
AI summary
Provided is a substrate holding apparatus capable of appropriately holding a substrate. The substrate holding apparatus is suggested to hold a substrate including a portion to be plated that is exposed to a plating solution and an edge portion that is an area outside the portion to be plated. The substrate holding apparatus comprises a grasp module to come in contact with the edge portion of the substrate and thereby grasp the substrate, a suction module to attract the portion to be plated of the substrate by suction to hold the portion to be plated, and a protrusion provided at a position corresponding to the portion to be plated in the substrate, and protruding toward the substrate to be held by the substrate holding apparatus more than the suction module.