Embedded Inductor Barrier Layers for Stable Substrate Plating

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Solution Overview

Problem

The integration of solid state magnetic materials like iron, nickel, and rare-earth metals into electronic substrates for inductors is hindered by their incompatibility with traditional plating chemistries, leading to leaching issues that affect the quality and stability of the plating process.

Innovation Solution

Incorporating a barrier layer, such as titanium, polymeric, or nitride materials, to prevent magnetic material leaching during plating, along with a plating seed layer and conductive fill material, to ensure the integrity and compatibility of the magnetic material within the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If solid state magnetic materials are integrated into electronic substrates to improve inductor performance, then inductor performance increases, but magnetic material leaching into plating chemistries occurs

Engineering Contradiction:
Improveinductor performanceVSAvoidmagnetic material leaching
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

A barrier layer is introduced as an intermediary between the magnetic material and the plating chemistry. This barrier layer prevents direct contact and chemical interaction between the magnetic material and plating solutions, thereby eliminating leaching while allowing the magnetic material to maintain its inductor performance function.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The structure is segmented into distinct layers: the magnetic material layer is separated from the plating chemistry by an intermediate barrier layer. This segmentation isolates the magnetic material from harmful chemical environments while maintaining its functional integrity for inductor operation.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If traditional plating chemistries are used for manufacturing, then manufacturing process is simple, but magnetic material leaching affects plating quality and stability

Engineering Contradiction:
Improveplating process simplicityVSAvoidplating quality
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The barrier layer is formed prior to the plating process as a preliminary protective measure. This pre-established barrier prevents magnetic material leaching during subsequent plating operations, ensuring plating quality and stability without requiring modifications to the plating chemistry itself.

Inventive Principle:
Principle #10Preliminary action

3Speed

If magnetic materials are embedded in electronic substrates to support faster integrated circuit devices, then circuit speed increases, but plating chemistry stability deteriorates

Engineering Contradiction:
Improvecircuit speedVSAvoidplating chemistry stability
Core Design Contradiction:
SpeedVSStability of the object's composition

Solution Approach 1:

The barrier layer serves as a protective intermediary that isolates the magnetic material from the plating chemistry. This prevents chemical interactions and leaching that would otherwise destabilize the plating chemistry, allowing high-speed circuits to be manufactured with stable plating processes.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively prevents magnetic material leaching, maintaining the quality and stability of the plating process while ensuring the performance and integration of magnetic materials in electronic substrates for advanced integrated circuit devices.

Implementation Method 1

a barrier layer on the magnetic material layer, wherein the barrier layer prevents the magnetic material from leaching into plating solutions

Methodology Applied
Scientific EffectPhysical barrier: Physical Containment

Implementation Method 2

inductors are passive electrical components that store energy in a magnetic field generated by a magnetic material

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Implementation Method 3

solid state magnetic materials comprising iron, nickel, cobalt, and rare-earth metals

Methodology Applied
Scientific EffectFerromagnetism: Ferromagnetism

Data Source

PatentUS12057252B2Electronic substrates having embedded inductors
Publication Date: 2024.08.06 INTEL CORP
  • US12057252B2 patent drawing
  • US12057252B2 patent drawing
  • US12057252B2 patent drawing

AI summary

An electronic substrate may be fabricated by forming a base substrate and forming an inductor extending through the base substrate, wherein the inductor includes a magnetic material layer and a barrier layer, such that the barrier layer prevents the magnetic material layer from leaching into plating solutions during the fabrication of the electronic substrate. In one embodiment, the barrier material may comprise titanium. In another embodiment, the barrier layer may comprise a polymeric material. In still another embodiment, the barrier layer may comprise a nitride material layer. The inductor may further include a plating seed layer on the barrier layer and a conductive fill material abutting the plating seed layer.