Substrate Processing Plate Support for Uniform Gap Control
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Solution Overview
Problem
Existing substrate processing apparatuses suffer from sagging plates due to weight, leading to degraded substrate processing quality due to inconsistent gaps between the plate and the substrate.
Innovation Solution
A substrate processing apparatus with a gap controller connected to a first plate and an RF power feeding line, which controls the gap between the lid and the first plate, reducing sag and maintaining consistent substrate-plate gaps.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the plate is coupled only to the chamber, then the structure is simple, but the plate sags due to its own weight causing inconsistent gaps
Solution Approach 1:
The support structure is segmented into multiple independent support points (first support, second support, third support) distributed across the plate. This segmentation allows each support point to independently bear specific portions of the plate's weight, preventing uniform sagging and maintaining gap consistency without requiring a complex overall restructuring
Solution Approach 2:
The support points are pre-positioned at specific locations on the plate before operation. The first support is positioned at the center and the second and third supports are positioned at corners, creating a predetermined support configuration that proactively prevents sagging before it occurs during substrate processing
2Area of stationary object
If the plate area is increased to process larger substrates, then the processing capability is improved, but the plate weight increases causing more severe sag
Solution Approach 1:
The support structure uses multiple distributed support points instead of a single centralized support. This segmentation allows the support load to be distributed across multiple locations, enabling larger plate areas to be supported without proportional increases in sag, as each support point handles a portion of the total weight
Solution Approach 2:
Multiple support functions are merged into a coordinated system where the first support (at center) and second and third supports (at corners) work together. This combined support system provides distributed weight bearing capability that scales better with plate area than a single support point would
3Weight of stationary object
If the plate is made thinner to reduce weight, then the sag is reduced, but the plate strength and rigidity decrease
Solution Approach 1:
The support points act as counterweight elements that provide upward support forces to counteract the plate's self-weight. By positioning supports at strategic locations (center and corners), the system creates counterbalancing forces that prevent sagging without requiring the plate itself to be thicker or heavier, thus maintaining both weight reduction and structural integrity
Solution Approach 2:
The support structure applies localized support at specific critical points (center and corners) rather than distributed support across the entire plate surface. This local quality approach provides maximum structural support where needed while maintaining plate thinness elsewhere, optimizing the balance between weight reduction and rigidity maintenance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces sag in the first plate, enhancing the consistency of the substrate processing by maintaining uniform gaps, thereby improving the quality of processed substrates.
Implementation Method 1
The gap controller may be connected with an RF power feeding line
Data Source
AI summary
The present inventive concept relates to an apparatus for processing a substrate, the apparatus comprising: a chamber which includes a lid on top; a first plate which is installed under the lid and in which a plurality of gas holes is formed; a second plate coupled to the first plate and including a plurality of gas holes that communicate with some of the plurality of gas holes of the first plate; and a distance adjustment part which is connected to the second plate, adjusts the distance between the lid and the first plate, and is connected to an RF power feeding line.