Substrate Position Correction Using Accumulated Carrier Data
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Solution Overview
Problem
Existing substrate processing apparatuses face inefficiencies in accurately detecting and correcting the storage positions of substrates within carriers, leading to potential processing errors and reduced throughput due to inconsistencies in substrate positioning and carrier deterioration.
Innovation Solution
A substrate processing apparatus equipped with a detection part to identify substrate positions and a correction part that adjusts the reference accommodation position based on accumulated detection data from past carriers, enhancing accuracy and reducing abnormality determinations by optimizing the reference position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mapping process is performed to detect substrate storage state and position before taking out substrates from the cassette, then the accuracy of substrate positioning is improved, but the processing time and throughput are reduced due to the additional detection step
Solution Approach 1:
The system performs mapping processes in advance and accumulates the results. By building a historical database of substrate positions from previous mapping processes, the system can predict and correct positions without requiring frequent full mapping operations, thus reducing the time penalty while maintaining accuracy.
Solution Approach 2:
The system uses accumulated mapping data from multiple carriers as feedback to continuously improve position detection accuracy. The correction unit applies learned patterns from historical data to correct current substrate positions, reducing the need for repeated full mapping processes and improving throughput while maintaining precision.
2Device complexity
If the reference accommodation position is fixed and not corrected, then the device complexity is reduced, but the manufacturing precision deteriorates due to carrier deterioration and positioning inconsistencies
Solution Approach 1:
The system performs self-correction by automatically comparing detected substrate positions with the reference accommodation position and applying corrections based on accumulated data. This self-service mechanism maintains precision without requiring complex external calibration systems or manual intervention.
Solution Approach 2:
The system dynamically adjusts the reference accommodation position parameters based on accumulated mapping data from multiple carriers. By allowing the reference position to evolve and adapt based on observed variations, the system compensates for carrier deterioration and positioning inconsistencies while maintaining relatively simple device architecture.
3Manufacturing precision
If mapping processes are performed frequently to maintain position accuracy, then the manufacturing precision is improved, but the loss of time increases due to repeated detection operations
Solution Approach 1:
The system performs mapping processes in advance and accumulates results for future use. By building a historical database during initial or periodic mapping operations, the system can rely on accumulated data for subsequent carriers, reducing the frequency and time of full mapping operations while maintaining position accuracy through the correction unit.
Data Source
AI summary
There is provided a substrate processing apparatus, including: a mounting part on which a carrier having a plurality of slots capable of accommodating a plurality of substrates is mounted; a transfer part configured to load and unload the substrates to and from the plurality of slots based on a reference accommodation position set in the mounting part; a detection part configured to detect a position of each of the plurality of substrates accommodated in the plurality of slots; and a correction part configured to correct the reference accommodation position based on port accumulation information in which detection results obtained by the detection part from a plurality of carriers which has been mounted on the mounting part in the past are accumulated.