Substrate Heating Base with Radiation Channel Temperature Sensing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing apparatuses face challenges in accurately detecting and controlling the conditions of substrates during processing, particularly when the substrate is heated from one side and treated from the opposite side, due to limited access, which affects the quality of the processed product.
Innovation Solution
A substrate processing apparatus with a base having a heating element and radiation sensors that allow electromagnetic radiation to pass through, enabling the measurement of substrate conditions such as temperature, using radiation channels and conductors to protect the sensors from processing conditions, and allowing for precise temperature control and coating thickness determination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the substrate is heated from one side and treated from the opposite side, then the processing can be performed with improved access to the treatment side, but the actual conditions of the substrate during processing become difficult to detect
Solution Approach 1:
The radiation sensor is positioned on the back side of the base, detecting electromagnetic radiation that passes through the substrate from the front side. This dimensional arrangement allows the sensor to measure substrate conditions (such as temperature) without interfering with the treatment process on the front side, effectively resolving the access vs. detection contradiction by utilizing the third dimension (back side access).
Solution Approach 2:
Electromagnetic radiation serves as an intermediary that carries information about the substrate's front side conditions to the sensor on the back side. The radiation passes through the substrate and heating element, enabling indirect measurement of substrate temperature and conditions without direct contact or interference with the treatment process.
2Measurement precision
If radiation sensors are placed close to the substrate for accurate measurement, then the measurement precision improves, but the sensors are exposed to harmful processing conditions
Solution Approach 1:
The substrate itself and the heating element act as intermediaries that transmit electromagnetic radiation from the substrate to the sensor. This allows the sensor to remain on the protected back side of the base while still receiving radiation that carries information about the substrate's front side conditions, thus achieving accurate measurement without exposing the sensor to harmful processing conditions.
Solution Approach 2:
The sensor detects a copy of the substrate's thermal radiation rather than directly measuring the substrate itself. This indirect measurement through electromagnetic radiation allows the sensor to remain physically separated from the substrate and processing environment while still obtaining accurate temperature and condition data.
3Strength
If the base structure is made solid for structural integrity, then the strength improves, but electromagnetic radiation cannot pass through to reach the sensor
Solution Approach 1:
The base is designed with non-uniform local properties: it is solid and strong in most areas to maintain structural integrity, but contains a specific radiation-transmissive region (opening or window) that allows electromagnetic radiation to pass through. This localized modification enables radiation detection without compromising the overall structural strength of the base.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time, precise detection and control of substrate conditions, leading to more homogeneous deposition layers and improved substrate quality by allowing for optimal temperature management and coating thickness monitoring.
Implementation Method 1
a heating element arranged on the base between the plane defined by said periphery of the substrate support and the process-side surface, the heating element comprising a passage allowing the passage of electromagnetic radiation from the plane defined by said periphery of the substrate support to the process-side surface
Implementation Method 2
at least one radiation sensor adapted to measure electromagnetic radiation
Data Source
Figure 1
Figure 2
Figure 3
AI summary
A substrate processing apparatus (10) comprises a base (19) with a process-side surface (190), a substrate support (14), arranged on the process-side surface (190) and designed to carry a substrate (17) at its periphery, the periphery, more specifically the plane defined by said periphery, being spaced apart from the process-side surface (190), wherein the substrate processing apparatus (10) further comprises a radiation sensor (21) adapted to measure electromagnetic radiation, arranged on a side of a back-side surface (191) of the base (19), a radiation channel (22, 23, 24, 25, 26), arranged between the radiation sensor (21) and the periphery of the substrate support (14), more specifically between the radiation sensor (21) and the plane defined by said periphery, wherein the radiation channel (22, 23, 24, 25, 26) is at least partially permeable to electromagnetic radiation.