Substrate Recipe Simulation for Processing Step Effect Visualization
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Solution Overview
Problem
Existing substrate processing methods rely heavily on engineer experience and trial and error when changing processing steps, lacking a systematic approach to visualize the effect of these changes on the processing result.
Innovation Solution
A computer program and device that utilize a simulation model to predict substrate shapes based on different recipes, allowing visualization of the effects of processing step changes by comparing predicted shapes and highlighting the differences between recipes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If substrate processing is performed according to a recipe with multiple processing steps, then processing results can be optimized, but the complexity of determining the optimal recipe increases due to reliance on engineer experience and trial and error
Solution Approach 1:
The patent creates a virtual copy of the substrate processing through simulation. A simulation model replicates the substrate and processing steps, allowing multiple recipe variations to be tested virtually without physical trial and error. This copying enables systematic exploration of recipe space while maintaining manufacturing precision goals.
Solution Approach 2:
The patent replaces the mechanical trial-and-error process with a computational simulation system. Instead of physically testing multiple recipes through manual trial and error, a computer-based simulation model performs the experiments virtually, substituting the mechanical process with digital modeling and analysis.
2Manufacturing precision
If processing steps are changed to optimize results, then manufacturing precision improves, but the time required for trial and error increases
Solution Approach 1:
The patent performs preliminary actions by pre-establishing a simulation model that can predict processing outcomes before actual manufacturing. The simulation model is prepared in advance with the substrate characteristics and processing physics, enabling rapid virtual testing of recipe modifications without waiting for physical experiment results.
Solution Approach 2:
By creating a virtual copy of the processing system through simulation, the patent enables parallel testing of multiple recipe variations simultaneously. Instead of sequential trial and error, multiple scenarios can be simulated concurrently, dramatically reducing the time required to identify optimal processing parameters.
3Manufacturing precision
If multiple recipe variations are tested to find the optimal process, then manufacturing precision improves, but the difficulty of detecting and measuring processing step effects increases
Solution Approach 1:
The patent segments the processing steps into discrete, identifiable components within the simulation model. Each processing step can be individually modified and tracked, allowing the system to detect and measure the specific effect of each step on the final substrate shape. This segmentation makes it easier to identify which processing steps have the most significant impact.
Solution Approach 2:
The simulation model provides feedback by comparing the predicted substrate shape from different recipe variations against the actual processing goals. This feedback mechanism enables systematic identification of which processing step changes produce the desired results, making the detection and measurement of processing step effects more straightforward and data-driven.
Data Source
AI summary
A non-transitory computer-readable storage medium, an information processing method, and an information processing device capable of visualizing an effect of a processing step on a processing result of a substrate are provided. The transitory computer-readable storage medium causes a computer to execute information processing of: acquiring a first recipe including a plurality of processing steps for processing a substrate, and a second recipe in which a part of processing steps is different from those in the first recipe, calculating, by a simulation, predicted shapes of the substrate processed according to the first recipe and the second recipe, and displaying the predicted shape corresponding to the first recipe and the predicted shape corresponding to the second recipe, and the processing steps that are different between the first recipe and the second recipe.