Substrate Transfer Robot Exhaust Duct for Particle Containment
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Solution Overview
Problem
Substrate processing apparatuses produce particles during operation, which are discharged into the surrounding atmosphere, leading to process defects and reduced yield due to particle entry into transfer passages and processing chambers.
Innovation Solution
The substrate transfer equipment incorporates a vertical actuating unit with an exhaust duct and a momentum reduction member to efficiently exhaust particles produced by the transfer robot, using fans and porous members to minimize particle leakage and momentum.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrate processing apparatus operates to process substrates, then substrate processing capability is improved, but particles are generated and discharged into the surrounding atmosphere causing process defects and reduced yield
Solution Approach 1:
The patent extracts and removes particles from the surrounding atmosphere using exhaust fans and exhaust passages. The exhaust fans are positioned to draw particles away from the transfer passage and processing chambers, preventing them from entering critical areas where they would cause defects.
Solution Approach 2:
The patent introduces air curtains as an intermediary barrier between the particle-generating areas and the transfer passage. The air curtains create a protective airflow that prevents particles from entering the transfer passage, acting as a mediator that blocks harmful particles without stopping the substrate processing operation.
2Object-generated harmful factors
If exhaust fans are installed to remove particles, then particle removal capability is improved, but energy consumption increases
Solution Approach 1:
The patent applies exhaust fans and air curtains selectively at specific locations where particles are most likely to enter the transfer passage, rather than implementing a comprehensive exhaust system throughout the entire apparatus. This localized approach reduces energy consumption while maintaining effective particle removal capability.
Solution Approach 2:
The patent implements partial exhaust action by positioning exhaust fans to target only the critical areas near the transfer passage and processing chambers, rather than exhausting all particles generated throughout the entire apparatus. This partial action approach reduces energy consumption while still preventing particles from entering critical areas.
3Object-generated harmful factors
If air curtains are used to prevent particle entry into transfer passage, then transfer passage cleanliness is improved, but device complexity increases
Solution Approach 1:
The patent uses air curtains, which are essentially flexible, invisible barriers created by controlled airflow, rather than rigid physical barriers or complex mechanical structures. This approach maintains transfer passage cleanliness while adding minimal structural complexity to the system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Maintains a clean transfer passage for substrates by effectively removing particles, enhancing the substrate processing system's efficiency and reducing defects.
Implementation Method 1
a first exhaust fan installed in the first exhaust passage to generate airflow moving from the first exhaust passage to the second exhaust passage
Implementation Method 2
a momentum reduction member provided to reduce momentum of particles that are discharged through the outlet of the second exhaust passage. The momentum reduction member may include a porous member
Data Source
AI summary
The present invention provides substrate transfer equipment. In an embodiment, the substrate transfer equipment includes: a transfer robot supporting the substrate; and a vertical actuating unit moving the transfer robot in an up-down direction, wherein the vertical actuating unit includes: a vertical frame having a slit formed with a longitudinal direction thereof provided in the up-down direction, and having a vertical space formed therein; an exhaust duct having an exhaust space connected with the vertical space and provided on a side of the vertical frame; and an actuating member positioned in the vertical space and moving a supporting unit in the up-down direction, wherein the exhaust duct is provided such that a first side is open toward the vertical space.