Substrate Transfer Robot With Pre-Hold Warpage Detection
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Solution Overview
Problem
Existing substrate transfer robots cannot accurately detect substrate warpage before holding, leading to potential damage during the transfer process.
Innovation Solution
A robot configuration with a substrate detector and shape abnormality examiner that examines substrate shape abnormalities using a non-contact height detection method, allowing pre-transfer examination to prevent unintended contact and damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an orientation detector is used to detect hand orientation, then the hand orientation can be adjusted based on detected information, but the substrate warpage cannot be detected before the hand holds it
Solution Approach 1:
The substrate detector performs non-contact height measurement of the substrate before the hand holds it, enabling preliminary detection of substrate warpage. This preliminary action allows the system to identify warped substrates in advance and avoid holding them, preventing potential damage while maintaining the existing hand orientation detection capability
Solution Approach 2:
A substrate detector is introduced as an intermediary device between the substrate storage apparatus and the hand. This detector uses non-contact height measurement to examine substrate shape abnormalities, providing critical information about substrate warpage without requiring direct contact or interfering with the hand's orientation detection function
2Productivity
If the robot holds and transfers substrates without pre-examination, then the transfer process is simple and fast, but warped substrates may be damaged during holding
Solution Approach 1:
The system performs preliminary non-contact height measurement and shape abnormality examination of substrates before they are held by the hand. This preliminary inspection identifies warped substrates that should not be held, allowing the robot to skip damaged substrates and maintain high transfer speed while preventing substrate damage
Solution Approach 2:
The substrate detector enables substrates to self-examine their own shape abnormalities through non-contact height measurement. The detector scans the substrate surface and identifies warpage without requiring external intervention or slowing down the transfer process, allowing the system to maintain productivity while preventing damage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Accurately determines substrate shape abnormalities before transfer, preventing damage by avoiding contact between the robot hand and warped substrates.
Implementation Method 1
The substrate detector detects absence or presence of the substrate in a non-contact manner
Data Source
AI summary
A robot that transfers a substrate includes an arm, a hand, a substrate detector, and a substrate shape abnormality examiner. The hand is installed to the arm and holds and transfers the substrate. The substrate detector detects absence or presence of the substrate in a non-contact manner. The substrate shape abnormality examiner examines the substrate for a shape abnormality based on a height detected by the substrate detector at which the substrate is located when it is not held by the hand.