Substrate Processing Sealing Member Pipe Cavity Thermal Management

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Solution Overview

Problem

In substrate processing apparatuses, the performance of moving components like lifter pins is compromised at low temperatures due to heat transfer from cooler regions, leading to abrasion and airtightness issues, as conventional lubricants and seals deteriorate, making it challenging to maintain both mobility and airtightness.

Innovation Solution

The apparatus incorporates pipe-shaped cavities between low-temperature and high-temperature regions to suppress heat transfer, using inert gas convection within these cavities to maintain the high-temperature region's temperature and prevent seal deterioration, while ensuring mechanical strength and efficient plasma processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the processing vessel is cooled to low temperature for substrate processing, then the substrate processing performance is improved, but the moving components suffer from heat transfer issues leading to seal deterioration and loss of airtightness

Engineering Contradiction:

Improveprocessing temperatureVSAvoidseal airtightness

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The support structure is divided into multiple temperature zones: a low-temperature region for substrate processing, a high-temperature region for moving components, and intermediate temperature regions. This segmentation allows each region to operate at optimal temperatures for its function, preventing seal deterioration while maintaining processing performance.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Heat insulation portions act as intermediary elements between the low-temperature processing region and the high-temperature moving component region. These intermediary structures block heat transfer pathways, protecting seals from temperature extremes while allowing the system to operate at low processing temperatures.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Device complexity

If conventional lubricants and seals are used in low-temperature regions, then the apparatus structure is simple, but the lubricant performance deteriorates causing abrasion and airtightness loss

Engineering Contradiction:

Improveapparatus structureVSAvoidlubricant performance

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The moving components requiring lubrication are extracted from the low-temperature region and placed in a high-temperature region. This separation removes the conflict between low-temperature operation and lubricant performance requirements, allowing conventional lubricants to function properly while the substrate processing occurs at low temperatures elsewhere.

Inventive Principle:

Principle #2Taking out (Extraction)

3Reliability

If heat insulation structures are added to protect moving components, then the seal reliability is improved, but the device complexity increases

Engineering Contradiction:

Improveseal reliabilityVSAvoidstructure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The support structure combines multiple functions: it provides mechanical support for the processing vessel, creates temperature zone separations, provides heat insulation pathways, and supports moving components. By merging these functions into a single integrated structure, heat insulation is achieved without proportionally increasing overall device complexity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The support structure serves as a multi-functional component that simultaneously performs structural support, thermal management, and component mounting functions. This universality allows heat insulation to be implemented as part of the existing support structure rather than as separate added components.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces heat transfer between temperature regions, preventing seal deterioration and maintaining airtightness and mobility of moving components, even when operating below the recommended temperature range for lubricants and seals.

Implementation Method 1

using inert gas convection within these cavities to maintain the high-temperature region's temperature

Methodology Applied

Scientific EffectConvection: Convection

Implementation Method 2

suppress heat transfer between temperature regions

Methodology Applied

Scientific EffectThermal Insulation: Thermal Insulation

Data Source

PatentUS11276591B2Substrate processing apparatus

Publication Date: 2022.03.15 TOKYO ELECTRON LTD

AI summary

An inside of a processing vessel is set to be in a vacuum atmosphere when a substrate processing is performed. A sealing member is provided with a pipe-shaped cavity formed between a low-temperature region having a relatively low temperature and a high-temperature region having a relatively high temperature when the substrate processing is performed. The sealing member is configured to seal the processing vessel.