Substrate Transfer Sensor Layout for Transparent Wafer Detection
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Solution Overview
Problem
Existing substrate detection sensors, particularly transmission type fiber sensors, fail to detect transparent substrates effectively due to light transmission, leading to erroneous detection.
Innovation Solution
A substrate detection system comprising a rod-shaped light projector and receiver, with a partition to prevent direct light incidence, allowing optical detection of transparent substrates by reflecting light off their surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a transmission type fiber sensor is used for substrate detection, then the sensor structure is simple and easy to manufacture, but transparent substrates cannot be detected accurately leading to erroneous detection
Solution Approach 1:
The patent inverts the detection principle from transmission type to reflection type. Instead of detecting light transmitted through the substrate, the sensor detects light reflected from the substrate surface. This inversion allows transparent substrates to be detected by capturing their reflective properties rather than relying on light blockage, thereby resolving the detection inaccuracy while maintaining sensor simplicity.
Solution Approach 2:
The patent changes the detection parameter from light transmission intensity to light reflection intensity. By measuring the reflected light from the substrate surface rather than transmitted light, the system can accurately detect transparent substrates. This parameter change enables the sensor to respond to the reflective characteristics of substrates regardless of their transparency.
2Productivity
If multiple stages of substrate transfer plates are used to transfer multiple substrates simultaneously, then productivity increases, but the complexity of the substrate transfer machine increases
Solution Approach 1:
The patent implements a universal substrate detection system where a single reflection-type sensor design can detect substrates across multiple transfer plates and stages. This multi-functional sensor configuration allows the same detection mechanism to be applied throughout the entire substrate transfer process, enabling simultaneous monitoring of multiple substrates without proportionally increasing system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Accurate detection of transparent substrates is achieved, enhancing detection sensitivity and reducing false positives, while maintaining compatibility with narrow-pitch substrate arrangements.
Implementation Method 1
a first end configured to emit a reference light from a first optical fiber
Implementation Method 2
a second end which substantially faces the first end and is configured to receive the reference light reflected by a rear surface or a front surface of the corresponding substrate, which is transparent
Data Source
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AI summary
There is provided a technique that includes: (a) at least one end effector configured to be capable of being inserted into a holder configured to accommodate a plurality of substrates in multiple stages without being in contact with the plurality of substrates, and gripping a corresponding substrate of the plurality of substrates respectively; and (b) at least one substrate detector arranged at a predetermined relative position with respect to the at least one end effector and configured to be capable of optically detecting the corresponding substrate in at least one selected from the group of a state in which the at least one end effector is inserted into the holder and a state in which the at least one end effector grips the corresponding substrate.