Substrate Support Groove Pressure Sensor Adhesive Erosion Detection
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in detecting adhesive erosion, which can lead to gas leaks and affect the positioning and processing of substrates, due to the lack of effective monitoring and detection methods.
Innovation Solution
A substrate support system with a base, electrostatic chuck, and adhesive that includes grooves on the base surface, where a pressure sensor measures pressure changes to detect gas leaks, allowing for the identification of adhesive erosion and potential substrate misalignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If adhesive is used to bond the electrostatic chuck to the base, then the substrate can be securely held and heat transfer gas can be supplied, but the adhesive may erode over time causing gas leaks and positioning errors
Solution Approach 1:
The patent applies preliminary action by providing grooves in the base before the adhesive is applied. These grooves are pre-positioned to detect adhesive erosion before it causes serious problems. The grooves allow gas to escape or be detected at early stages of adhesive degradation, enabling preventive maintenance before the adhesive completely fails and causes substrate positioning errors or gas leaks.
2Reliability
If pressure sensors are installed to detect adhesive erosion, then gas leaks can be detected early, but the device complexity increases
Solution Approach 1:
The patent uses an intermediary approach by introducing grooves as a mediator between the adhesive layer and the pressure sensor. The grooves act as channels that allow gas to reach the pressure sensor when adhesive erosion occurs, translating the adhesive's physical state into a detectable pressure signal without requiring direct contact between the sensor and adhesive, thus simplifying the overall detection system.
3Difficulty of detecting and measuring
If grooves are added to the base for gas supply and detection, then adhesive erosion can be monitored, but the manufacturing complexity increases
Solution Approach 1:
The patent applies segmentation by dividing the base into functional zones with grooves at specific locations. Rather than making the entire base complex, only specific groove features are added to the base structure. These segmented grooves are strategically positioned to monitor adhesive erosion at critical points while maintaining the overall simplicity of the base manufacturing process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable detection of adhesive erosion, preventing gas leaks and ensuring accurate substrate positioning by using pressure sensors to monitor pressure changes in the grooves, thereby improving processing efficiency and reliability.
Implementation Method 1
The substrate support further includes a pressure sensor. The pressure sensor is provided to measure a pressure in the one or more grooves.
Implementation Method 2
The base, the adhesive, and the electrostatic chuck provide a supply path for supplying a heat transfer gas between the electrostatic chuck and a substrate placed on the electrostatic chuck.
Data Source
AI summary
In a substrate support according to one exemplary embodiment, an adhesive is provided between an upper surface of a base and a lower surface of the electrostatic chuck. The base, the adhesive, and the electrostatic chuck provide a supply path for supplying a heat transfer gas between the electrostatic chuck and a substrate. The upper surface of the base defines one or more grooves. The one or more grooves are further away from a center of the upper surface than the supply path. The adhesive is provided to cover an upper end opening of each of the one or more grooves. The heat transfer gas is capable of being supplied to the one or more grooves via the supply path or a different flow path. The substrate support further includes a pressure sensor to measure pressure in the one or more grooves.