Tension Control in Substrate Processing Using Tape Diameter Calculation
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Solution Overview
Problem
Existing substrate processing apparatuses require additional processing and increased costs due to the need for optical sensors and complex calculations to maintain constant tape tension, which can lead to inaccuracies during polishing.
Innovation Solution
A substrate processing apparatus and control method that utilize a tape supply reel, a tape recovery reel, and a control unit to maintain constant tape tension by adjusting the torque of the recovery motor based on the outer diameter of the tape roll using the feed length and thickness of the tape, eliminating the need for optical sensors and reducing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If optical sensors are used to detect tape outer diameter, then tape tension can be maintained constant, but device complexity and cost increase
Solution Approach 1:
The patent replaces the optical detection system with a mechanical calculation approach. The control unit calculates tape outer diameter based on the relationship between tape feed length and tape thickness, eliminating the need for optical sensors while maintaining the ability to control tape tension through motor torque adjustment.
Solution Approach 2:
The system uses its own operational parameters (tape feed length and tape thickness) to calculate the tape outer diameter, rather than requiring external detection devices. This self-service approach reduces device complexity while maintaining control reliability.
2Reliability
If tape outer diameter is calculated by tilting polishing head and detecting rotary encoder, then tape tension can be maintained, but additional processing time is required between polishing operations
Solution Approach 1:
The patent enables continuous tape tension control during polishing operations without requiring the system to stop or perform additional processing steps between polishing tasks. The calculation method based on feed length and thickness allows real-time torque adjustment while maintaining continuous operation.
3Measurement precision
If optical sensors are installed on both sides of tape supply reel, then tape outer diameter can be detected, but space requirements and installation complexity increase
Solution Approach 1:
The patent extracts the detection function from external optical sensors and replaces it with an internal calculation method using operational parameters. This eliminates the need for additional space on both sides of the tape supply reel for sensor installation.
Data Source
AI summary
A substrate processing apparatus which causes a processing tape to abut against a processing object, including: a tape supply reel configured to supply the processing tape; a tape recovery reel configured to recover the processing tape; a recovery motor configured to apply a torque to the tape recovery reel; a tape feed motor configured to feed the processing tape between the tape supply reel and the tape recovery reel; and a control unit configured to control the tape feed motor, wherein the control unit controls the torque of the recovery motor depending on a change in an outer diameter of a roll of the processing tape wound by the tape recovery reel such that tension applied to the processing tape is constant, using a feed length of the tape fed by the tape feed motor and a thickness of the processing tape.