Substrate Transfer Alignment Using Inclination Sensor Feedback
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Solution Overview
Problem
Existing methods for correcting the delivery position of substrates from a substrate transfer apparatus to a processing apparatus in a depressurized atmosphere require exposing the processing apparatus to the atmosphere and involve significant evacuation time, which is inefficient.
Innovation Solution
A method and apparatus that utilize a sensor-equipped substrate with an inclination sensor to detect and correct the delivery position automatically, allowing for accurate alignment without exposing the processing apparatus to the atmosphere, using a controller to adjust the delivery position based on detection results from multiple temporary positions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual alignment method is used to correct delivery position, then alignment accuracy can be achieved, but processing apparatus must be exposed to atmosphere and significant evacuation time is required
Solution Approach 1:
The patent replaces the manual mechanical alignment method with an automated sensor-based detection and correction system. The inclination sensor automatically detects substrate position deviations, and the controller automatically adjusts the delivery position, eliminating the need for manual operations and atmospheric exposure while maintaining high alignment accuracy.
Solution Approach 2:
The substrate itself serves as the measurement object by equipping it with an inclination sensor that automatically detects its own delivery position. This self-detection capability eliminates the need for external manual measurement tools and atmospheric exposure, allowing the system to perform self-correction within the sealed depressurized environment.
2Measurement precision
If manual alignment operation is performed, then delivery position can be corrected, but the operation depends on operator skill and is time-consuming
Solution Approach 1:
The patent replaces manual operator-based alignment operations with an automated sensor detection and controller-based correction system. The inclination sensor objectively measures substrate position, and the controller automatically calculates and applies corrections, eliminating dependence on operator skill and significantly improving alignment efficiency.
Solution Approach 2:
The system implements a feedback loop where the inclination sensor continuously monitors substrate delivery position, and the controller uses this real-time data to automatically adjust the delivery mechanism. This closed-loop feedback system ensures consistent high-precision alignment without manual intervention, improving both accuracy and productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and precise correction of the delivery position, reducing the time required for alignment and avoiding the need for manual operations that depend on operator skill, while maintaining the processing environment.
Implementation Method 1
an inclination sensor provided on a substrate main body that imitates the substrate
Data Source
AI summary
A correction method includes a placement operation of holding and moving, by a holder, a sensor-equipped substrate equipped with an inclination sensor provided thereon, to a temporary delivery position, and delivering the sensor-equipped substrate from the holder to the stage, an inclination detection operation of detecting, by the inclination sensor, an inclination of the sensor-equipped substrate delivered to the stage, and performing the placement operation and the inclination detection operation on one or a plurality of different temporary delivery positions. The one or plurality of different temporary delivery positions include a position at which a portion of the sensor-equipped substrate is boarded on the stepped portion when the sensor-equipped substrate is delivered from a respective temporary delivery position to the stage. The method further includes a correction operation of correcting the delivery position based on a detection result in the inclination detection operation.