Substrate Transfer Arm Positioning for Bevel Polishing Accuracy
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Solution Overview
Problem
Conventional substrate processing apparatuses face challenges in preventing positional deviation and suppressing variation during bevel polishing, particularly due to the lack of effective mechanisms for precise substrate positioning.
Innovation Solution
A transfer machine equipped with an arm, holding part, turning part, and control part, which adjusts substrate position in the in-plane direction using measurement parts to turn the arm, and a substrate processing apparatus with similar components for precise positioning and diameter/angle deviation calculations, utilizing a turning axis orthogonal to the substrate carry-in direction and line sensors for accurate measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a jig is used for position adjustment during bevel polishing, then positioning precision is improved, but device complexity increases
Solution Approach 1:
The patent replaces the mechanical jig-based positioning system with an optical measurement system (line sensor) combined with a control system that adjusts the transfer machine's turning angle. The line sensor measures substrate position, and the control system calculates and adjusts the turning angle to achieve precise positioning without requiring physical jigs or fixtures.
2Manufacturing precision
If a complex positioning mechanism is introduced to prevent substrate positional deviation, then positioning precision is improved, but ease of operation deteriorates
Solution Approach 1:
The system performs self-positioning through automatic measurement and adjustment. The line sensor automatically measures the substrate position, the control system calculates the required turning angle adjustment, and the transfer machine automatically adjusts its turning angle. This closed-loop self-service mechanism eliminates the need for manual positioning operations while maintaining high precision.
3Ease of operation
If the turning axis is positioned on the carry-in port side, then ease of operation is improved, but device complexity increases
Solution Approach 1:
The turning mechanism serves multiple functions: it not only turns the substrate during transfer but also provides the positioning adjustment function by varying the turning angle. The same turning part that performs the basic transfer operation is also used for precise position control, eliminating the need for separate positioning mechanisms.
Data Source
Figure 1
Figure 2(a)~2(c)
Figure 3
AI summary
A transfer machine 80 has an arm 810; a holding part 830 that is provided on the arm 810 and that is configured to hold a substrate W; a turning part 100 that turns the arm 810 about a turning axis A; and a control part 50 that adjusts a position in an in-plane direction of the substrate W by turning the arm 810 by the turning part 100 based on the position in the in-plane direction of the substrate W, which is held by the holding part 830, measured by measurement part 110.