Substrate Transfer Apparatus Positional Deviation Measurement
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Solution Overview
Problem
Conventional automatic alignment apparatuses for substrates require significant linear movement to calculate positional deviations, leading to increased apparatus size and complexity.
Innovation Solution
A substrate transfer apparatus comprising a robot with a hand and arm to move the substrate, a camera to capture images, and a control device to set and alter moving paths, allowing for positional deviation measurement and compensation without extensive linear movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the substrate is linearly moved to a great extent to calculate positional deviation amount, then the positional deviation can be measured, but the apparatus size increases
Solution Approach 1:
The patent transitions from one-dimensional linear movement measurement to three-dimensional spatial measurement using a camera. The camera captures images at multiple positions, and the control device calculates positional deviation based on image analysis and hand movement data, eliminating the need for extensive linear movement of the substrate or measurement devices.
Solution Approach 2:
The patent replaces the mechanical linear movement system with an optical measurement system. Instead of physically moving the substrate or sensors along a linear path, the system uses a camera to capture images and a control device to calculate positional deviation based on image data and robot hand movement information, substituting mechanical displacement with optical detection and computational analysis.
2Measurement precision
If the substrate is linearly moved to a great extent, then positional deviation calculation is possible, but the device complexity increases
Solution Approach 1:
The robot hand serves multiple functions: it transfers the substrate and simultaneously provides positional information for deviation measurement. The camera serves both as a verification tool and a measurement device. This multi-functionality reduces the need for separate dedicated measurement mechanisms, thereby simplifying the overall apparatus.
Solution Approach 2:
The camera acts as an intermediary between the robot hand and the control device. Instead of directly measuring substrate position through complex mechanical sensors, the camera captures images that the control device analyzes to determine positional deviation, providing a simpler measurement pathway.
3Measurement precision
If a camera is added to measure positional deviation, then measurement accuracy improves, but device complexity increases
Solution Approach 1:
The robot hand's own movement information is used to assist in the measurement process. The control device combines image data from the camera with known hand movement data to calculate positional deviation, allowing the system to use its own operational data for measurement purposes without requiring additional external reference systems.
Data Source
AI summary
A substrate transfer apparatus of the present invention includes: a robot including a hand configured to hold a substrate, and an arm configured to move the hand; a robot control device configured to set a moving path for the hand and control the arm such that the hand moves on the moving path toward a target position; and a camera disposed so as to be able to capture an image of the substrate held by the hand located at a predetermined confirmation position. The robot control device sets the moving path so as to pass through the confirmation position, obtains an image captured by the camera when the hand is located at the confirmation position, calculates a distance between a predetermined environment and the substrate which are taken in the image, and calculates a positional deviation amount from a reference position of the substrate on the basis of the distance.