Substrate Transfer Calibration with Stored Eigendata for Alignment Precision
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Solution Overview
Problem
Existing substrate transfer apparatuses face challenges in achieving precise alignment and operation accuracy due to variations in installation environments, leading to inefficiencies and the need for complex recalibration at installation sites.
Innovation Solution
A method involving the calibration of substrate transfer apparatuses by fixing the apparatus, measuring its operation, generating eigendata, and storing it for later use in controlling the apparatus' components to align with theoretical design values, thereby simplifying and improving the accuracy of installation and operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If substrate transfer apparatus is installed in different environments, then adaptability is improved, but alignment precision deteriorates due to environmental variations
Solution Approach 1:
The patent applies preliminary action by pre-measuring and storing eigendata (actual dimensional characteristics) of the substrate transfer apparatus components during manufacturing. This eigendata is stored in memory before installation, allowing the system to compensate for environmental variations during operation without requiring recalibration, thus maintaining alignment precision across different installation environments.
2Manufacturing precision
If complex recalibration is performed at installation sites, then alignment precision is improved, but time consumption and operational complexity increase
Solution Approach 1:
The patent eliminates the need for complex on-site recalibration by performing the measurement and data storage actions preliminarily during manufacturing. The eigendata capturing the actual dimensional characteristics is stored in memory before installation, enabling the system to automatically compensate for variations without requiring time-consuming recalibration procedures at the installation site.
Solution Approach 2:
The substrate transfer apparatus performs self-calibration by utilizing its own stored eigendata to compensate for environmental variations. The system automatically adjusts its operations based on the pre-stored dimensional characteristics, eliminating the need for external calibration equipment or complex recalibration procedures, thus reducing both time and operational complexity.
3Ease of manufacture
If traditional calibration methods are used, then manufacturing simplicity is maintained, but operational precision deteriorates due to environmental variations
Solution Approach 1:
The patent maintains manufacturing simplicity by using standard measurement and data storage procedures during production, while simultaneously improving operational precision through the application of stored eigendata during operation. The approach does not require complex manufacturing processes but rather the intelligent use of pre-captured dimensional data to compensate for environmental variations during actual use.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances operational precision and simplifies the calibration process by using stored eigendata to adjust and align components accurately, reducing the need for extensive recalibration and minimizing reteaching at installation locations.
Implementation Method 1
an end effector including a target that reflects light
Data Source
AI summary
A method of calibrating a substrate transfer apparatus according to one or more embodiments may include: fixing a substrate transfer apparatus; measuring the operation of the fixed substrate transfer apparatus; generating eigendata relating to an operation of the fixed substrate transfer apparatus; and storing the eigendata in the substrate transfer apparatus.