Substrate Transfer Load Measurement for Fixing Force Control
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Solution Overview
Problem
Existing substrate transfer systems lack effective means to determine the suitability of the fixed state of substrates to transfer robots, leading to potential detachment issues due to abnormal fixing forces, which can result in inefficient processing and equipment malfunction.
Innovation Solution
A processing system that includes a substrate placing stage, multiple load measurers, and a determiner to assess the load applied to the stage, calculating a fixing force based on measured loads and comparing it to a threshold value to determine the suitability of the substrate's fixed state, with the option to clean support members if the force exceeds the threshold.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substrate transfer systems operate without load measurement and fixing force detection, then the system structure remains simple and cost-effective, but substrate detachment occurs due to abnormal fixing forces leading to processing interruptions
Solution Approach 1:
The patent implements a feedback mechanism where load measurers continuously monitor the fixing force during substrate transfer, and the determiner provides real-time assessment of whether the fixing force is within acceptable ranges. This closed-loop feedback system enables automatic detection and response to abnormal fixing conditions, preventing substrate detachment without requiring complex preventive mechanisms.
Solution Approach 2:
The patent replaces complex mechanical monitoring systems with a sensor-based measurement approach. Instead of using complex mechanical linkages or multiple physical sensors, the system employs load measurers that directly quantify fixing force through standardized measurement interfaces, simplifying the overall system architecture while maintaining high reliability.
2Measurement precision
If multiple load measurers are deployed to accurately measure fixing force, then the precision of fixing force detection improves, but the device complexity and cost increase
Solution Approach 1:
The patent divides the measurement function into multiple independent load measurers positioned at different locations on the substrate placing stage. Each measurer independently monitors local fixing force conditions, and the determiner integrates these segmented measurements to assess overall fixing suitability. This segmentation enables comprehensive coverage with modular, easily replaceable components.
Solution Approach 2:
The load measurers are designed with universal interfaces and standardized measurement protocols that can be applied across different substrate types and transfer conditions. The same measurer design can serve multiple functions: monitoring fixing force during transfer, detecting abnormal conditions, and providing data for process optimization, thereby reducing the need for specialized expensive sensors for each function.
3Productivity
If real-time load measurement and fixing force determination are implemented, then substrate detachment is prevented and processing continuity is maintained, but measurement and detection time is required reducing effective processing throughput
Solution Approach 1:
The system performs preliminary measurement of fixing force during the substrate transfer process itself, before any potential detachment can occur. The load measurers continuously monitor the fixing force from the beginning of transfer, and the determiner assesses suitability in real-time, enabling preventive action before failures happen rather than reactive response after problems arise.
Solution Approach 2:
The patent ensures continuous monitoring of fixing force throughout the entire substrate transfer process without interruption. The load measurers operate continuously, and the determiner maintains constant assessment, eliminating gaps in detection. This continuous action prevents processing interruptions by detecting and responding to abnormal conditions before they cause substrate detachment, maintaining uninterrupted productive activity.
Data Source
AI summary
A disclosed processing system includes a substrate placing stage, at least one measurer, and a determiner. The substrate placing stage is configured to place a substrate transferred by a transfer device thereon. The at least one measurer measures a load applied to the substrate placing stage from the substrate when the substrate is transferred from the transfer device onto the substrate placing stage. The determiner determines a suitability of a fixed state of the substrate to the transfer device based on the load measured by the at least one measurer.