Substrate Transfer Device with Real-Time Optical Position Correction
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Solution Overview
Problem
Existing substrate transfer devices face challenges in achieving high precision due to mechanical properties that digitize movement trajectories, making it difficult to control substrate movement accurately.
Innovation Solution
A transfer device equipped with a transfer unit, position detecting units, and a control unit that calculates and corrects the transfer destination position in real-time, modifying the initial transfer path to ensure precise substrate positioning along a smooth trajectory.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the transfer device uses mechanical properties to perform digital correction of the transfer destination position, then the correction can be implemented, but the movement trajectory of the substrate becomes digitized which makes it difficult to control the substrate movement with high precision
Solution Approach 1:
The patent replaces the mechanical correction system with an optical field-based system. A light source emits light that reflects off the substrate surface, and a sensor detects the reflected light to determine substrate position. This optical measurement system enables continuous, high-precision trajectory control without the discretization inherent in mechanical correction systems.
Solution Approach 2:
The patent introduces light as an intermediary between the substrate and the detection system. The light reflects off the substrate surface and carries position information to the sensor, enabling non-contact, continuous measurement of the substrate's movement trajectory throughout the transfer process.
2Ease of operation
If the transfer device transfers the substrate to the initial transfer destination position first and then corrects the position, then the transfer process can be completed, but the two-stage process (transfer then correct) increases the complexity of controlling high precision movement
Solution Approach 1:
The patent implements continuous position detection and correction throughout the entire transfer process. The light source continuously illuminates the substrate, and the sensor continuously tracks the substrate position, enabling real-time correction without stopping or pausing the transfer motion.
Solution Approach 2:
The patent performs preliminary position measurement at the start of the transfer process. The optical detection system measures the substrate position before and during transfer, allowing the system to calculate and apply correction values proactively rather than reactively after the transfer completes.
Data Source
AI summary
A transfer device includes: a transfer unit configured to transfer a substrate from a transfer original position to a corrected transfer destination position; a plurality of position detecting units installed between the transfer original position and the corrected transfer destination position and configured to detect a position of the substrate which is being transferred by the transfer unit; and a control unit configured to calculate the corrected transfer destination position by correcting an initial transfer destination position set at the start of the transfer of the substrate, based on the position of the substrate detected by the position detecting units, before the substrate is transferred to the initial transfer destination position, and configured to control the transfer unit to transfer the substrate to the corrected transfer destination position along a transfer path produced by modifying an initial transfer path.