Magnetic Substrate Transfer Path Correction for High-Speed Routing
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Solution Overview
Problem
Existing substrate transfer systems face challenges in accurately moving substrates along preset routes due to deviations caused by various error factors, such as misalignment of magnets and coils, and variations in device characteristics, leading to potential contact with other devices during high-speed transfers.
Innovation Solution
A substrate transfer device that includes a movement tile with multiple first magnets to change the magnetic field state and a substrate transfer module with a second magnet that floats above the movement surface. The device features a transfer controller to adjust the magnetic field, a detector to measure deviations from the preset route, and a correction parameter calculation part to adjust the magnetic force and correct the substrate transfer module's path.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If substrate transfer is performed at high speed, then productivity is improved, but deviation from preset route increases causing potential contact with other devices
Solution Approach 1:
The system employs a detector to monitor the actual movement path of the substrate transfer module and feeds this information back to the transfer controller. The controller calculates correction parameters based on the detected deviation from the preset route and adjusts the magnetic field in real-time to correct the path, enabling high-speed transfer while maintaining route accuracy
Solution Approach 2:
The system dynamically changes the magnetic field parameters (strength and distribution) generated by the plurality of magnets based on detected position deviations. By adjusting magnetic field parameters in real-time, the system corrects trajectory deviations that occur during high-speed substrate transfer, maintaining both speed and precision
2Productivity
If magnetic field strength is increased to improve transfer speed, then productivity is improved, but deviation from preset route increases
Solution Approach 1:
The system applies different magnetic field strengths to different regions by controlling individual magnets in the plurality of magnets. The transfer controller adjusts the magnetic field locally based on the detected position deviation, applying stronger fields where needed to correct deviations without uniformly increasing field strength across all areas
Solution Approach 2:
The system dynamically adjusts magnetic field strength and distribution during the transfer process based on real-time position feedback. Rather than maintaining a static strong magnetic field, the system modulates field parameters dynamically to correct deviations while maintaining overall transfer speed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves more accurate movement of the substrate transfer module along the preset route, reducing deviations and preventing contact with other devices, thereby ensuring reliable and precise substrate transfer operations.
Implementation Method 1
a second magnet configured to receive an action of a magnetic force which is at least one of a repulsive force and an attractive force acting between a magnetic field of the plurality of first magnets and a magnetic field of the second magnet
Data Source
AI summary
A substrate transfer device is provided with: a movement tile provided in a substrate transfer region and including first magnets for changing a state of a magnetic field and a movement surface; a substrate transfer module including a second magnet that receives a magnetic force and configured to move along the movement surface while being floated from the movement surface by the magnetic force; a transfer controller for controlling the magnetic field formed by the first magnets to move the substrate transfer module along a preset route; a detector for detecting an index value corresponding to a magnitude of a deviation, from the preset route, of an actual movement path of the substrate transfer module moving along the movement surface; and a correction parameter calculation part for calculating a correction parameter for correcting the magnetic force acting on the second magnet based on the index value.