Substrate Transfer Robot Carrier Alignment Imaging
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Solution Overview
Problem
Existing substrate transfer robots face challenges in accurately detecting and compensating for the displacement of carrier coupling positions relative to load ports, leading to potential misalignment during substrate delivery and receipt.
Innovation Solution
A substrate transfer robot equipped with a robot arm, imaging device, and controller that captures images of the carrier and load port edges to detect deviations from a predetermined reference position, allowing for real-time adjustment of the robot's operation to ensure precise substrate handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If automatic transfer system is used to transfer carrier to stage, then transfer efficiency is improved, but position alignment accuracy deteriorates due to displacement between predetermined reference position and actual carrier placement position
Solution Approach 1:
The imaging device captures images of the carrier and stage position, and the control unit processes these images to detect actual positions. This feedback mechanism allows the system to identify displacement between reference and actual positions, enabling real-time correction of positioning errors while maintaining automatic transfer operations
Solution Approach 2:
The patent replaces mechanical positioning measurement methods with an optical imaging system. The imaging device and image processing system substitute for traditional mechanical sensors and alignment mechanisms, providing non-contact, high-precision position detection that maintains transfer speed while improving alignment accuracy
2Productivity
If carrier is docked with load port opening in displaced state, then substrate transfer operation continues, but substrate delivery accuracy deteriorates due to displacement between reference coupling position and actual coupling position
Solution Approach 1:
The imaging device continuously monitors the coupling position between carrier and load port. The control unit processes these images to detect actual coupling positions and uses this feedback information to correct substrate transfer operations, maintaining both operational continuity and delivery accuracy
Solution Approach 2:
The system dynamically adjusts substrate transfer parameters based on detected position deviations. By changing operational parameters in real-time according to actual coupling positions, the system maintains substrate delivery accuracy even when carriers are docked in displaced states
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate detection and compensation of carrier displacement, ensuring stable and precise substrate transfer operations across multiple load ports, regardless of specifications, thereby preventing interference and improving handling accuracy.
Implementation Method 1
an imaging device attached to the hand or the robot arm... acquires a captured image including a peripheral edge of the opening and the carrier coupled to the opening
Data Source
AI summary
A substrate transfer robot delivers/receives a substrate to/from the carrier for the substrate, coupled to an opening of the load port on a first side of the load port, from a second side opposite to the first side via the load port through the opening, and the substrate transfer robot includes a hand holding the substrate, a robot arm coupled to the hand and displacing the hand, an imaging device attached to the hand or the robot arm, and a controller configured to control operation of the robot arm and the imaging device. Controller acquires a captured image including a peripheral edge of the opening and carrier coupled to the opening and performs image processing on captured image to detect deviation of the coupling position of the carrier from a predetermined reference coupling position, the peripheral edge and the carrier being captured from the second side by the imaging device.