Substrate Transfer Robot Intersecting Sensor Teaching
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Solution Overview
Problem
Existing substrate transfer robots face challenges in achieving high positional accuracy during the automatic teaching of the teaching position, which is crucial for precise substrate placement in semiconductor processing facilities.
Innovation Solution
A substrate transfer robot equipped with an arm having degrees of freedom in two horizontal axes, a hand with bifurcated ends, and intersecting optical sensors that emit detection light, allowing for precise alignment and acquisition of the teaching position by intersecting detection light beams, ensuring accurate substrate placement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single sensor is used to scan the teaching position, then the device complexity is low, but the positional accuracy of the teaching position is insufficient
Solution Approach 1:
The single sensor is divided into two separate sensors (first sensor and second sensor) with different detection directions. Each sensor scans along a different axis, and their detection results are combined to determine the teaching position, thereby improving measurement precision through multi-directional detection.
Solution Approach 2:
The detection approach transitions from single-axis scanning to two-dimensional scanning by introducing a second sensor oriented perpendicular to the first sensor. This dimensional expansion allows the system to capture position information from multiple angles, enhancing positional accuracy.
2Reliability
If the hand structure is simplified, then the device complexity is reduced, but the ability to securely hold and position the substrate is compromised
Solution Approach 1:
The hand is segmented into a base end and two bifurcated front ends (first front end and second front end). This segmentation creates a stable triangular support structure that securely holds the substrate while providing multiple attachment points for the sensors, thereby improving placement reliability.
Solution Approach 2:
Different parts of the hand structure are assigned specific functions: the base end provides structural support and connection to the arm, while the bifurcated front ends provide substrate contact points and sensor mounting positions. This localized functional assignment optimizes both structural integrity and sensing capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the positional accuracy of the teaching position, enabling the robot to securely place substrates at the predetermined position, improving the reliability of substrate transfer operations in semiconductor processing.
Implementation Method 1
first and second sensors that emit detection light in a space between the first front end and the second front end
Data Source
AI summary
A substrate transfer robot, first and second sensors are provided in a hand such that a planar-view intersection point of optical axes is located on a center of a substrate when the hand holds the substrate in planar view, and a control device operates an arm, scans a target placed at a teaching position with the first and second sensors, and acquires the teaching position when the target is located at the planar-view intersection point of the optical axes.