Substrate Transfer Robot Slip Preventing Member Design
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Substrate transfer robots in vacuum processing apparatuses face issues with substrates dropping due to thermal contraction and warping, leading to loss of adhesion between the substrate and slip preventing members, and excessive adhesion causing positional displacement during transfer.
Innovation Solution
The substrate transfer robot employs cylindrical or T-shaped substrate slip preventing members made of perfluoroelastomer with protruding sections that absorb thermal expansion and contraction, maintaining firm adhesion and reducing static frictional force, while allowing for easy replacement and improved mechanical strength to prevent positional displacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the contact area between the substrate and the top surface of the slip preventing member is large, then the adhesion between the substrate and the elastic material is strong, but the substrate has to be peeled off at the firmly adhering part during delivery, causing positional displacement
Solution Approach 1:
The slip preventing member is divided into multiple protruding sections (typically 3-5) arranged in a circular pattern on its top surface. Each protruding section contacts a different region of the substrate, distributing the adhesion force across multiple discrete points rather than a continuous large-area contact. This segmentation maintains strong overall adhesion while allowing the substrate to be released without excessive peeling forces that would cause positional displacement.
2Reliability
If the slip preventing member is made of elastic material to maintain adhesion during thermal contraction, then the static frictional force is sufficient, but the radial distortion of the substrate is small and insufficient to maintain tight adhesion
Solution Approach 1:
The slip preventing member is designed with elastic material properties that allow it to change its physical parameters (shape, height, contact area) in response to thermal contraction. The protruding sections are configured with specific heights and base diameters that enable them to deform elastically when the substrate thermally contracts, maintaining optimal contact pressure and adhesion force throughout the thermal process.
Solution Approach 2:
The slip preventing member transitions from a static rigid structure to a dynamic elastic structure that can adapt its configuration. The protruding sections can deflect and deform in response to substrate thermal contraction, automatically adjusting their contact characteristics to maintain adhesion. This dynamic response allows the system to accommodate substrate dimensional changes while preserving the adhesion necessary for secure transfer.
3Temperature
If the substrate is warped at high temperature, then the effective contact area between the rear surface and the substrate slip preventing member is reduced, but the adhesion force becomes insufficient, causing the substrate to drop during transfer
Solution Approach 1:
Instead of relying on uniform large-area contact that is sensitive to substrate warping, the invention concentrates adhesion function at multiple localized protruding sections. Each protruding section independently maintains contact with the substrate even when the substrate surface is warped or non-planar. This local quality approach ensures that adhesion is maintained at critical contact points regardless of overall substrate warping, preventing substrate drop during high-temperature transfer.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures reliable and stable transfer of hot substrates by maintaining adhesion and preventing drops, while minimizing positional displacement and extending the service life of the slip preventing members.
Implementation Method 1
the protruding section arranged on a base wall of each substrate slip preventing member is so designed as to be distorted when it is subjected to shear stress due to thermal expansion or thermal contraction on the part of the substrate W
Implementation Method 2
the protruding section arranged on a base wall of each substrate slip preventing member is so designed as to be distorted when it is subjected to shear stress due to thermal expansion or thermal contraction on the part of the substrate W
Implementation Method 3
having top surfaces to be tightly adhered to the rear surface of the substrate... the static frictional force produced between the substrate slip preventing member and the substrate
Data Source
Figure 1~2
Figure 3~5
Figure 6~8
AI summary
Provided is substrate transfer robot which can surely eliminate adhesion, shifting, dropping and the like of substrate at the time of transferring the substrate. A vacuum processing apparatus provided with such substrate transfer robot is also provided. The substrate transfer robot is provided with a substrate receiving section for placing the substrate; a plurality of substrate slip preventing members, which are arranged on the upper surface of the substrate receiving section at intervals and are composed of an elastic material; and an extendable/retractable arm section whereupon the substrate receiving section is arranged at the leading end. On the upper end surface of the substrate slip preventing member, a protruding section is arranged. The vacuum processing apparatus is configured as a multi-chamber processing apparatus provided with the substrate transfer robot.