Substrate Transfer Device Tilting and Fixing Mechanism

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Solution Overview

Problem

Existing substrate transfer devices lack efficient mechanisms for tilting and fixing during substrate transfer, which limits their ability to accurately deliver and process substrates across multiple devices in semiconductor manufacturing processes.

Innovation Solution

A substrate transfer device equipped with a tilting mechanism and a fixing mechanism, allowing the substrate holder to be tilted for delivery and fixed during transfer, enabling precise handling and processing of substrates across multiple devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the substrate holder is made movable for tilting during delivery, then the ability to deliver substrates to multiple devices is improved, but the stability during transfer deteriorates

Engineering Contradiction:

Improveability to deliver substrates to multiple devicesVSAvoidstability of substrate holder during transfer

Core Design Contradiction:

Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The substrate holder is designed with a tilting mechanism that allows it to change its orientation dynamically. During delivery, the holder can be tilted to match the receiving device's orientation, enabling versatile substrate transfer to multiple devices with different orientations. During transfer, the holder maintains a fixed stable position. This dynamic adaptability resolves the contradiction between versatility and stability.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The tilting mechanism changes the orientation parameter of the substrate holder based on the operational phase. When delivering substrates, the orientation parameter is adjusted to match the receiving device. When transferring substrates, the orientation parameter is kept constant to ensure stability. This parameter-based control enables the holder to adapt to different operational requirements.

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If the substrate holder is fixed during transfer, then the transfer accuracy is improved, but the delivery flexibility to multiple devices deteriorates

Engineering Contradiction:

Improvetransfer accuracyVSAvoiddelivery flexibility to multiple devices

Core Design Contradiction:

Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The substrate holder transitions between fixed and movable states based on the operational phase. During transfer, the holder is fixed to ensure high transfer accuracy. During delivery, the holder becomes movable and tiltable to adapt to different receiving devices. This dynamic state change resolves the contradiction between precision and flexibility.

Inventive Principle:

Principle #15Dynamics

3Adaptability or versatility

If a tilting mechanism is added to the substrate transfer device, then the delivery capability is improved, but the device complexity increases

Engineering Contradiction:

Improvedelivery capabilityVSAvoidcomplexity of substrate transfer device

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The tilting mechanism is integrated into the substrate holder to provide multi-functionality. The same mechanism serves both to enable delivery to multiple devices with different orientations and to maintain stability during transfer through controlled positioning. This universal design approach minimizes additional complexity while maximizing delivery capability.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS11120985B2Substrate transfer device, substrate processing system, substrate processing method and computer-readable recording medium

Publication Date: 2021.09.14 TOKYO ELECTRON LTD

AI summary

A substrate transfer device configured to transfer a substrate while holding a first surface of the substrate by a substrate holder and configured to deliver a second surface of the substrate is provided. The substrate transfer device includes a tilting mechanism configured to perform tilting of the substrate holder when viewed from a side; and a fixing mechanism configured to stop the tilting of the substrate holder when viewed from the side.